7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

50 to 600 CXS25 CXS32 Allowable kinetic energy (J) 0.17 0.271 0.32 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 Cushion Needle Adjustment Caution Theoretical Output (N) 1.Keep the adjusting range for the cushion needle between the fully closed position and the rotations shown below.

MVGQ

Note 2) For the specifying way of ordering numbers for the solenoid valve with adapter assembly, refer to page 10-16-4. 10-16-19 20 Series MVGQ Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 16 100 12 20 25 32 40 50 63 80 D-Z7/Z8 8.5 14 7.5 9.5 9.5 11 11 11 13 13 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 11.5 5 6 6.5 8.5 8.5 9 10

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

VQ5000

527 547 n: Stations (11 stations max.)

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

MGC

75, 100, 125, 150, 350, 400, 450, 500, 600, 700, 800 200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32 MGCll40 MGCll50 Model CDGIBA20 CDGIBA25 CDGIBA32 CDGIBA40 CDGIBA50 Base cylinder

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

PF-OMN0009_C

/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC -20No.PF-OMN0009CN-F -21No.PF-OMN0009CN-F ,FG 1 DC() 2 N.C./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k 420 mA 15V/420mA NC DC(-) 12 V 300 24 V 600 PF3W5--1T 15 V DC(+)

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

3

If the failure cannot be solved after the above instructions are performed, please contact SMC for investigation. 11 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

ZSE2/ISE2

: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6

Series KV2 Fittings

-35S KV2Y07-34S KV2Y07-35S KV2Y07-36S KV2Y11-07-35S KV2Y11-07-36S KV2Y11-35S KV2Y11-36S KV2Y11-37S KV2Y13-07-37S KV2Y13-11-36S KV2Y13-11-37S KV2Y13-35S KV2Y13-36S KV2Y13-37S KV2Y15-37S 14.29 14.29 14.29 14.29 19.00 14.29 14.29 17.46 19.00 19.00 19.00 19.00 22.23 23.80 23.80 22.23 19.00 19.00 22.23 23.80 13.2 13.2 13.2 13.2 17.9 13.2 13.2 13.2 17.9 17.9 17.9 17.9 17.9 21.7 21.7 21.7 21.7 21.7

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature