High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

MGP

7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

VZ100/300/500

(Valve) DXT201-15-6A1 pc. (Blanking plate assembly) DXT201-15-4A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30,

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

CQS

5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 1*

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

SFOD-OMT0005CN

Word Bit 9 0-15 *1 1% Word10 Word Bit 10 0-15 *1 1 mm/s Word11 Word Bit 11 0-15 *1 1% Word12,131 Word Bit 12 0-15 1() (-)(+)*1 *2 0.01 mm 13 0-15 1() Word14,152 Word Bit 14 0-15 2() (-)(+)*1 *2 0.01 mm 15 0-15 2() Word16,17 Word Bit 16 0-15 () *1 *2 0.01 mm 17 0-15 () *1 *2 20(P.83) -40- 10 () EtherNet/IP 4.3 EtherNet/IP (P.22) 2 () * () () 3 10.1 12 64 ()() Acceleratio

JA/JAH/JB/JS

15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series

JA/JAH/JB/JS

15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series

MNB

(different sides or same side) Reed switch Solid state switch D-A5, D-A6 15 20 1 pc. 2 pcs. (different sides or same side) 20 D-A59W 25 15 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5, J5 10 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5NTL 10 1 pc. D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 pcs.

Auto Switch Guide

/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 9-15-27 Grommet 9-15-28 Connector 9-15-29 Band 9-15-30 Terminal conduit 9-15-31 9-15-32 Grommet 9-15-33 Rail 9-15-34 Connector 9-15-35 Grommet Tie-rod 9-15-36 Terminal conduit 9-15-37 9-15-39 9-15-38 9-15-40 Grommet 9-15-41 Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

T

Refer to pages 15-18-3 to 4 for Safety Instructions and Common precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Min. bending radius (mm) 12 15 23 27 31 60 12 15 23 30 40 Operating temperature 20 to +60C (No freezing) Nylon 11, Nylon 12 Material Caution 1.

CRBB-OM00004

Assembly / Disassembly procedure 4.1 With vertical auto switch unit 19 Cross recessed round head screw 2 For D-M9 18 Switch holder 2 For D-M9 Size: 10, 15 17 Cross recessed round head screw 2 3pcs. for size 15 16 Cross recessed round head screw 2 15 Cross recessed round head screw 2 14 Holding block (B) 2 13 Switch block (B) 1 12 Switch block (A) 1 3pcs. for size 15 11 Cross recessed round