Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 G 11 13 15 19 CDRA1BW50 CDRA1BW63 CDRA1BW80 CDRA1BW100 15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

Table of Contents

TMH-06 26.5 10.6 11 20 10 11 7.2 4.3 7.1 TMH-07 TMH-09 TMH-08 TMH-10 TMH-11 34 14.6 14.2 28 14 14 9.6 4.3 9.5 TMH-12 TMH-13 15-9-13 1 Dual Speed Controller with One-touch Fitting Series ASD Model Enables bi-directional flow control.

CL

15.5 18 4 6 3.5 55 8 8 73.5 13 20 Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5 M8 x 1.25 189 180 11.5 127 9 38 20 19.5 22 12 5

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Vacuum System Peripherals:

Check valve: Series AK 13-14-15 Manifold Specification Sheet 1. For ejector system: Series ZX 13-14-18 2. For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

AC

SAC1000, #1 + #2 + #3 + #13 SAC2000, #1 + #2 + #3 + #13 SAC2503, #1 + #2 + #3 + #13 SAC4000, #1 + #2 + #3 + #13 SAC4006, #1 + #2 + #3 + #13 SAC5000, #1 + #2 + #3 + #13 SAC6000, #1 + #2 + #3 + #13 AC1000 AC2000 AC2500, 3000 AC4000 AC4000-06 AC5000 AC6000 1.1-8 Air Combination Filter Regulator + Lubricator AC1010 to 4010 JIS symbol AC3010 AC2010 AC1010 Filter regulator Lubricator Standard Specifications

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/

Cylinder with Lock

37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109

MY1

58 70 88 104 14.6 7 20 24 29 35 14 14 13 17 17 39.5 45.5 53.5 67 83 106 129 30 32 38 50 57 3.6 3.6 3.5 4.5 4.5 5.8 5.8 6.5 8.5 10 14 14 40.8 40.8 46.7 67.3 67.3 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB0806 RB0806 RB1007 RB1412 RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Refer to pages 8-13-12 to 8-13-13 for detailed selection procedures. 8-13-6 7 Model Selection Series MY2 Moment/MY2C MY2C/M1 MY2C/M3 MY2C/M2 50 40 50 40 50 40 30 30 30 MX 20 20 20 MTS MY 10 10 10 MY2C40 CY Moment Nm Moment Nm Moment Nm MY2C40 MY2C40 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

15

LEC Y Motorless Motorless Dimensions [mm] LAT Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LZ 25 15 to 100 89.5 13 20 44 45.5 M8 x 1.25 24 17 12.5 34 M5 x 0.8 8 45 46.5 1.5 105 to 400 114.5 LC3F2 32 20 to 100 96 13 25 51 56.5 M8 x 1.25 31 22 16.5 40 M6 x 1.0 10 60 61 1 105 to 500 126 * The L measurement is when the unit is at the retracted stroke end position.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Table of Contents

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

REA/REB

Usable range 30 40 50 50 40 30 20 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REA63 REA50 50 40 30 REA40 REA32 Load weight W (kg) 20 REA25 10 1 100 200 300 Maximum speed U mm/s 4 Series REA Model Selection 3 Max

•

20 or more:Special order Liste Pad Dia -Pad Type ~"'" ;r""" 2 4 6 8 10 13 16 20 25 32 40 SO 86 MeX l .25 Ast type FJat)wtth nil Daao tvoe l!