MY1

X m3 x g m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting M3 Static load (m) m1 m2 m3 m4 Note) M1 Static moment M1 m1 x g x X m2 x g x X m4 x g x Z z y M2 m1 x g x Y m2 x g x Y m3 x g x Z Y Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a mass movable by thrust.

High Power Cylinder Series RHC

X Y LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) Effective thread length A D E F GA GB H I JC JD K LD LH H1 H2 10 15.5 8 5 25 7 5 30.5 43 26 44 47.5 53.5 16 14.5 18 200 to 700 20 19.5 8 6 28 7 5.5 25.5 39 31 48 49.5 56.5 16 18 22 12 200 to 700 25 19.5 9 6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200

New

Grommet (with surge DIN terminal Conduit terminal voltage suppressor) fitting P Q R Q R Q R S Q R S T 1 2 3 C6, C8 1.06 1.16 1.26 1.67 2.01 2.22 1.18 1.28 1.38 1.14 1.46 1.69 2.54 2.64 2.74 1.36 1.69 1.91 2.07 2.17 2.26 3.92 4.02 4.11 1.44 1.77 1.99 2.70 2.80 2.89 3.21 3.60 3.88 C8, C10 C10, C12 21 Series VX2 For Air Dimensions/Body Material: Resin inch Conduit Faston type Y Y W W U U X

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

MY2

g x Y m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

Thermo-chiller

If the set pressure needs to be adjusted, it should be conducted by authorized engineers. w Outlet piping assembly (With globe valve) e Return piping assembly r Barrel nipple (Size: 3/4 inch) (4 pcs.) t Union (Size: 3/4 inch) (4 pcs.) y Sealant tape u Operation Manual 21 Optional Accessories Series HRS100/150 y Snow Protection Hood Snow protection hood for air-cooled chiller.

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

rep-modular-e

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-21 pc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

IR1000/2000/3000

AL 14-5-21

Title not found

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VZ (Except VQZ100) VQZ300 DIN terminal (Y) DIN terminal (YZ) Locking type (Tool required) VS VFN Except VQZ100 ) ( 3.2 4.1 Except VQZ100 ) ( 4-14-21 Base Mounted 22 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Slenoid Valve Precautions, refer to page 4-18-2.