High Power Cylinder Series RHC

47.5 53.5 68 38 21 51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 5) [ ]: Denotes normal position.

HRX-OM-X037

screen . 5-16 Alarm reset . 5-17 Alarm name . 5-17 Alarm log record . 5-18 Display of alarm/maintenance reminder . 5-19 5.4.5 Check operation time screen and maintenance reminder . 5-20 HRL Series HRX-OM-X037 Contents Setting the usage time of DI filter.5-22 Setting of the usage time of dustproof filter (Only for air-cooled type) .5-22 5.4.6 Software version screen .5-23 5.4.7 CH1 setting

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

side: Same) 7 5 8 8.5 35 8 2 x M3 x 0.5 thread depth 5 4 (20) (Z) 2 x M4 x 0.7 thread depth 7 6 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

HRX-OM-W032

(TEMP READY) signal . 5-19 5.8.2 Ready completion (TEMP READY) signal setting / checking . 5-20 5.9 Offset Function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Usage example of offset function . 5-23 5.9.3 Setting/checking of offset function. 5-25 5.10 Operation Restoration after Power Failure . 5-27 5.10.1 Operation restoration function after power failure . 5-27 5.10.2 Setting/checking of

Wedge Cam Operation Provides

MHK2-25l/Standard model 22 4H9 depth 4 +0.030 0 2-M6 X 1thread depth 10 (Mounting thread) 22 26H9 depth 1.5 +0.052 0 2-M6 X 1 thread depth 12 (Mounting thread) 4-M6 X 1thread depth 12 (Mounting thread) 0 -0.1 Bottom hole 5.1 through (Mounting hole) 10 Open 33 +1.2 0 5 17.5 20 0.02 71.6 74 40 52 36 0 -0.2 Closed 19 30 26 4H9 depth 4 +0.030 0 22 47.2 102.7 33.6 0.05 Groove position for auto

Auto Switch Guide

RS H A Auto Switch Internal Circuit D-B53 RZQ MI W S CEP1 Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) CE1 D-B53 D-B54 D-B64 Auto switch model Zener diode CE2 22 22 22 0.5 Lead wire length (m) 78 78 78 3 ML2B 126 126 5 D-B54 C J G5-S Dimensions Zener diode CV Choke coil Resistor OUT () Blue OUT (+) Reed switch LED MVGQ Surge absorber CC Indicator light DB64 without indicator

Shock Absorbers and Rate Controls

t 9 60 60 241 l 2 l 48 76 0E113.()flx2 245 265 98 il85 x 2 69 76 l{0 70 J8 5l 0tlll3.0llx3.5 323 343 98 M 8 5 x 2 22 69 76 v9 90 58 7l Otlll3.0frlx5 399 419 90 M 8 5 x ? 22 69 76 2tl r09 58 7l Otl{13.0Iir6.5 494 514 98 l{85 x ? 22 8l 8l ?

VQ5000

None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .

SYJA3000

SYJ3000-21-2A1 pc. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 3.1-16 Series SYJA3000 Body Ported Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 Y R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 9 7 . 1 ) 5 . 5 4 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 3 0 . 2 ) 5 . 1 5 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 Y R K 2 3 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 Y R K 4 2 . 1 ) 5 . 1 3 ( 9 0 . 2 ) 3 5 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 Y R K 0 4 . 1 ) 5 . 5 3 ( 9 1 . 2 ) 5 . 5 5

High Power Cylinder:

22 24 H1 5 6 6 8 H2 8 8 9 11 REA REC Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 NF 13 17 17 22 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NE 33.5 37 43.5 52.5 K 5 5.5 5.5 7.5 NC 5.5 5.5 4.5 4.5 JD 30.5 25.5 28.5 23 NB 30 36.9 43.9 47.3 JC 43 39 36 32 NA 26 32 38 41 I 26 31 38 47 H 44 48 51 54.5 N 22

MK

5 !6 !7 !8 !

MQQ

22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

MQQ

22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

MHK2

MHKL2-16: Long stroke type D2014 2-M4 x 0.7 thread depth 5 (Mounting threads) 22 3H9 Depth 3 +0.025 0 17H9 depth 1.5 +0.043 0 2-M4 x 0.7 thread depth 8 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 28.6 +1.2 0 4 10 12 0.02 22 56 54 34 24 0 0.2 28 Closed 14.6 3H9 depth 3 +0.025 0 15 38.5 15 63 23.6 0.05 83 Auto Switch Mounting

MHK2

MHKL2-16: Long stroke type D2014 2-M4 x 0.7 thread depth 5 (Mounting threads) 22 3H9 Depth 3 +0.025 0 17H9 depth 1.5 +0.043 0 2-M4 x 0.7 thread depth 8 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 28.6 +1.2 0 4 10 12 0.02 22 56 54 34 24 0 0.2 28 Closed 14.6 3H9 depth 3 +0.025 0 15 38.5 15 63 23.6 0.05 83 Auto Switch Mounting

I/O Configurator (NFC version)

Refer to 5. Pairing of wireless unit (Page 70) for the registration procedure. (1) (4) (2) (5) (3) (4-1) Registered Remote Details of the registered Remote.

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6