ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Solid State Auto Switches

64 78 92 69 77 91 107 121 57 58 60.5 64 67 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1590 2-Color Indication Type Solid State Auto Switch Direct Mounting Style D-M9NW(V)/D-M9PW(V)/D-M9BW(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Brake mechanism added

24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5 30 36 15.5 52 14 19 21 31 76 25 16 M12 x 1.75 11

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52

SMC

60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40 25 36 72 76 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 GA 15 15 15 42 51 61 111 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 KA 125.5 179.5 13-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping (12) MXS12-P 1322Air

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) L2 L1 27 P = 10.5 8.8 28 (5.25) Applicable connector: Flat ribbon cable connector (26P) (Complies with MIL-C-83503) 23.5 63.5 <67.5> 13 (12) Indicator light Manual override 1.5 4.8 66 (5.5) (35) A A A B A B A B A B A 93.5 <100.4> 40.5 (12) (7.5) M4 mounting hole 35 2 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Weight Auto Switch Internal Circuit D-F8N (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 OUT Black 5 52 52 52 DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC () Blue 3.1

REC

0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front flange: F 182 167 148 118 0.3 Foot: L L 1 140 128 114 90 0.5 0.5

CE2

rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5 58 0 235.5 3/8 175.5 312.5 30 M18 x 1.5 1/4 66 11.2 52 326 58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD

MK

of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52

REC

Stroke Against Lateral Load D RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114

RSQ

A 152.5 154 B 52.5 54 E 52 64 I 69 86 J 5 7 M 40 50 N 5.5 6.6 O counterbore 9 depth 7 11 depth 8 T 44 56 Z 14 19 W 66 80 U 35 41 Bore size (mm) 40 50 Data Note 1) Dimensions without auto switch are the same as drawing above. Note 2) These figures show the dimensions when equipped with D-A73 or D-A80 auto switches.

Auto Switch Guide

D-X 20Weight Auto Switch Internal Circuit Data D-F8N (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 OUT Black 5 52 52 52 DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-29-11 12 Series CXS Specifications Precautions Bore size (mm) 25 20 32 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Port size Bearing type Cushion Air (Non-lube) Be sure to read before handling.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

stopper Aluminum alloy 20 Bearing 674 Electric Actuator/Slider Type Ball Screw Drive LEFS Series AC Servo Motor Dimensions: In-line Motor LEFS25 3H9 ( ) depth 3 +0.025 0 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (7) Body mounting reference plane Note 1) LEF 45 38 LEJ LEL 50 3.5 3H9 ( ) depth 3 +0.025 0 LEM Motor option: With lock LEY (2.2) L Encoder cable (7) (52