MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1

REA/REB

8 !4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

Secondary Batteries

CE-certified Symbol EX124D-SMJ1-X182 CC-Link (Negative common) V A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 C8 C10 C12 M A, B port Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 A, B

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

C95

D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) MB A B A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

LEC-OM02704CN

(ZP)[1][2][8][0]17bit 14 37 14 (5) ON/OFF((DO)) ON/OFF [9][0] (a) DO [8][B][0][0]0004DO 0 0 0 4 4 DO (b) ON/OFF [9][2] [A][0] b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 (c) DO DO[8][B][0][0] [8][B] [0][0] 0 DO 14 38 14 (6) (a) [8][B][0][0]0003 0 0 0 3 3 (b) ([8][B]

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5 19 20.5 22.5 19 NCA 50 17 11 14 16 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 24 63 17 11 14 16 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 24 DOperating Range -X Auto switch

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

5 R 3/5 R 4 A 4 A 4 A 4 A 4 A 63.3 79.8 1 P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R) port] One-touch fitting 1 P 2 B P 1 2 B 2 B 2 B 2 B -+ -+ : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] 1/4,3/8 -+ -+ One-touch fitting Applicable tubing O.D.: 6, 1/4" (X: External pilot port) Applicable tubing O.D.: 6,

LEC-OM02904

[mV] PC11 1(M01) -9 PC12 2(M02) 5 24 5 (2) 1(MO1)2(MO2) No.PC09PC10 3 0 1 CCW CCW CCW 8[V] 8[V] 0 0 8[V] 8[V] CW CW CW 2 CCW 3 8[V] 8[V] CW CW CCW CW CCW 0 0 4 5 (4) CCW CCW 8[V] 8[V] () 0 0 () 8[V] 8[V] CW CW 6 (146) (10V/100pulse) 7 (146) (10V/1000pulse) CCW CCW 10[V] 10[V] 100[pulse] 1000[pulse] 0 0 100[pulse] 1000[pulse] 10[V] 10[V] CW CW 8 (146) (10V/10pulse) 9 (146)

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Signal name 1 24 V (Output) 2 0 V (Output) 3 24 V (Control and input) 4 0 V (Control and input) 5 F.E. (2) EX600-ED3PWR IN: 7/8 inch 5-pin Plug Configuration Pin No. Signal name 1 0 V (Output) 2 0 V (Control and input) 3 F.E. 4 24 V (Control and input) 5 24 V (Output) (3) EX600-ED4PWR IN: M12 4-pin Plug A code PWR OUT: M12 5-pin Socket A code Configuration Pin No.

Tie-rod Type Hydraulic Cylinder

, 12 V 12 V IC circuit Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2

CNA

GL GR D E MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95

CNA

E D FY FV BF e H1 V AL 8 f l K A C h + l BN N F FX ZZ + l + Stroke FT S + Stroke ZZ + Stroke H FZ Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BF BN BP BQ C D E F FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 30 27 60 22 71 96 1/8 1/8 44 16 32 10 9 12 60 80 42 100 85 15 52 16 12 12 10 8 Up to 500 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Table (3) Rated Voltage Electrical Option Class B Solenoid valve (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Rated voltage S L Z VX21 Model VX22 VX23 Voltage symbol Voltage With surge voltage suppressor With light and surge voltage suppressor With light AC/ DC 01 ( ) 1 8 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5