Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

VS 8-2/VS 8-4

Regarding a vacuum switch valve and a vacuum release valve If a non-vacuum valve is installed in the middle of piping system having a vacuum, the vacuum condition will not be maintained. Use a valve designed for use under vacuum condition. 10.

Air Fittings & Tubing

(mm) A Part No.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

Table of Contents

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CJ2

B B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

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A12 Symbol, A13 Symbol A14 ::l C. ~ ,DA c Rball 1 \ B ~l , I ~ I H l i Symbot, A16 Symbol,A15 Symbol' A17 Symbol A1S Symbol A 19 .. ~ ~i >If? I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

Direct Solenoid

P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

Series PF2W Digital Flow Switch For Water

Although the circuit at the output side of the switch is surgeprotected, damage may still occur if a voltage surge is applied repeatedly. When a load which generates a surge, such as from a relay or solenoid valve, is directly driven, use a switch with a built-in surge absorbing element. 4. Since the type of fluid varies depending on the product, be sure to verify the specifications.

17

MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY-S25 MY-S32 MY-S40 Applicable cylinder A 105 130 145 B 119 148 167 C 35 45 55 D 50 64 80 E 8 11.7 14.8 F 5 6 8.5 G 9.5 11 14 H 5.5 6.6 9 J M6 x 1 M8 x 1.25 M10 x 1.5 A B A B A B MY1H25 MY1H32 MY1H40 MY1 HT Side supports consist of a set of right and left supports.

PSE200

When a surge generating a load such as a relay or solenoid is directly driven, use a type of switch with a built-in surge absorbing element. 4. Since the type of fluid varies depending on the product, be sure to verify the specifications. The switches do not have an explosion proof rating. To prevent a possible fire hazard, do not use with flammable gases or fluids. 5.

o

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

o

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!