ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

18 A1 L1 U1 Y-10D 100 37 21 40 83 83 M26 x 1.5 20 30+0.3 +0.1 61 21 38 4 x 30l Polished round 20 RR1 * A knuckle pin, split pins and flat washers are included.

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

15

27 27 10.5 22.5 14 8.6 25 5.5 74 28 51 2 10 104 76 95 9 12 Bumper bolt Adjustment bolt P Shock absorber T PB S Z PA PW Q QW R R1 UU W Y1 Model Nil TN TF NN adjustable range adjustable range (Both sides: R1 x 2) (Both sides: Y1 x 2) CY1S6-Z M6 x 0.75 RJ0604N M4 x 0.7 M30.5 25 25 49 52 7.5 15 42 10 46 11.5 23 62 16 1 CY1S10-Z M8 x 1 RJ0806HN M4 x 0.7 M50.8 25 38 61 60 5.5 11 47 12.5 58

Aluminum High Vacuum Angle Valve

30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH.

Compact Cylinder

55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw

Table of Contents

27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l

MGQ

38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

D 11.4 11.4 13.4 d 6 6 8 WX 38 48 54 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 Bore size (mm) 25 32 40 8-12-19 20 Series MY1W Dimensions: 50, 63 4-MM depth M (LL) L 4-B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB PG Q+ Stroke Rc 3/8 (Hexagon socket head taper plug) This port is not available for use.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Refer to p. 38 for details.) This pressure switch has increased corrosion resistance due to the use of stainless steel 316L for the parts in contact with fluid (pressure sensor and fitting).

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Proposals for Energy Saving

Note 3) 50cSt or less 38 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Direct Air Operated 2 Port Valve For air, gas, vacuum, water, oil Series VXA21/22 Air Purge Models/Valve specifications Normally Closed (N.C.)/Normally Open (N.O.)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

TABLE OF CONTENTS

X .22 (5.6) MFT 2 PLACESAS SHOWN . 2.14 (54.4) 2.14 .71 (18.0) .71 (54.4) (18.0) 1.19 (30.2) 1.19 .80 (20.3) DIA. .80 (20.3) (30.2) .60 DIA. .96 .96 (24.4) .60 (15.2) (24.4) (15.2) B A A B .94 (23.7) .38 (9.5) TYP . .38 (9.5) TYP . 1/8-27 NPT (2) PLACES 7/16-24 UNS-2A (2) PLACES .94 (23.7) 1.88 (47.6) 2.43 (61.7) . . . .

Series SV

1A SV 2 000 38 1 A Port size Series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting C3 C4 C6 N1 N3 N7 SV2000 SV3000 SV4000 2 3 4 Thread type Nil F N T Rc G NPT NPTF Individual SUP spacer 38 Spacer type Port size for Series SV2000/3000/4000 Series SV2000 SV3000 SV4000 Port size 1/8 1/4 Accessory Series Round

CLA

lH 55 V-1Od 100 37 40 83 M26Xl .S 21 38 201re

Rotary Actuator

Combination between -Xl and -XAl Symbol Description Applicable shaft type Applicable size Combination X Z T J K -XA33 to 38, 40 to 46, 51 to 59 -X6 Stainless steel shaft/bolt, etc.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

ZP

48 11 14.5 20.5 8.4 9.6 11.7 8.5 9.7 11.8 12 15 19 31.5 38 48 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

IDG

Unit (Refer to pages 14-19-37 and 38.) 10 3.00 1.35 15 2.17 1.22 Example: Model to be selected in case of IDG30 Single unit IDG30 Inlet air pressure 0.5 MPa on the flow characteristics (page 14-19-12), Inlet air flow 206 l/min (ANR) P1 = 0.006 MPa Allowable pressure drop P Unit IDG30M 0.03 MPa P1 = 0.01 MPa (Element initial state) P1 = 0.055 MPa (Element saturated state) 20 1.52 1.10 25