High Vacuum Angle Valve

Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 L-M6 C 4H9 Refer to Cross section C-C.

Made to Order

Without auto switch magnet Bore size 20 to 32 With auto switch magnet Bore size 32 T G With auto switch magnet Bore size 20, 25 L A + Stroke A G L Bore size (mm) T 125 stroke or more 10 10 10 10 10 125 to 300 stroke 12 22 23 23 25 27 75, 100 stroke 50 56.5 58.5 64 73.5 85 125 to 300 stroke 67.5 77 78.5 80 91 102.5 100 stroke or less 5 5 5 5 5 100 stroke or less 4.5 5 7 17 18 18 20 22

CJ2

Bore size (mm) 6 CJ-L006B CJ-F006B Mounting bracket 10 CJ-L010B CJ-F010B CJ-T010B T-bracket is used with double clevis (D). 16 CJ-L016B CJ-F016B CJ-T016B Foot bracket Flange bracket T-bracket Auto Switch Mounting Bracket Part No. (Band mounting style) Bore size (mm) 6 10 16 Auto switch mounting bracket no.

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

CJ2

Sliding Resistance at the Low Friction Side Mounting Bracket Part No. 0.08 Bore size (mm) 16 Mounting bracket 10 10 0.07 Foot CJ-L010B CJ-L016B 16 Sliding resistance(MPa) Flange CJ-F010B CJ-F016B 0.06 T bracket CJ-T016B T bracket is used with double clevis (D). CJ-T010B 0.05 Auto Switch Mounting Bracket Part No. (Band mounting) 0.04 Bore size (mm) 10 16 Bracket part No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Hydraulic

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Table of Contents

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Modular F.R.L. Unit

Note 2) Drain guide: G1/4 (applicable to AC25 to 60) AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR Port size M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 AC20C to 40C AF + AFM + [T] + AR AC20 to 40 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-

2/3 Port Valve

T Conduit terminal See table 1 below for applications.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Free Mount Cylinder

auto switch Single acting, Spring extend No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 1 pc. 5 5 10 2 pcs. 10 5 Weight/( ): Denotes the values with D-A93 (g) Stroke (mm) Model 5 10 15 34 (44) 55 (65) 81 (111) 153 (193) 271 (330) 422 (500) 28 (33) 43 (48) 60 (85) 113 (147) 212 (266) 331 (404) 31 (41) 47 (57) 66 (90) 124 (164) 229 (288) 357 (435) S T S T S T S T S T

Possible to transfer a workpiece at low-speed.

Static load (Ts) Necessary torque T = Ts Resistance load (Tf) Necessary torque T = Tf x (3 to 5) 0.015 Nm < Effective torque OK Necessary torque T = Tf x (3 to 5) + Ta x 10 Inertial load (Ta) Necessary torque T = Ta x 10 P. 304 Checking rotation time 3 Converted to the time per 90 for comparison.

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

•

T ype ;A .S C I ' D E F Y J ~ _L ~ " 4 15 9.5 14 4 4.5 6.5 7,5 ~ ZPlODQ Dl0 10 12 4 13 10,7 15 6 ::l 4 15 9.5 " ) L :l2 ~ 4 _'5 10 1~ ZP16DQ 016 16 18. '4 13, 11;.]11 1~ ,7 ZP4 ::l U40 4, 43 7 18 13.7 18.5 ZP25DO 025 25 28 4 15 15,5 20 10 I 0$0, I 50 53 7 18 14.7 ' 19.5 ZP40DO 0'\0 ,40 43 7 18 ~ "24.2 29 I .t~ lIE lndlcate malerlallo be selected at the end of part No.

Vacuum

t-qt l_-!el!