AS-FG/ASD-FG

19.8 46.9 41.9 48.8 43.8 19 R(PT) 3/8 40 14 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 64.8 57.3 57.6 50.1 24 R(PT) 1/2 25.9 49.6 18.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions for M5 x 0.8 and R(PT) threads after installation. 13 Series ASD-FG Dimensions/Inch Size Applicable tube O.D

Power Clamp Cylinder

) 1.08 (2.38) 65 280.1 150.2 22 201 Series CKZT Dimensions (Clamp Arm: Offset 15) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through

SFOD-OMT0009CN

1 3 4 1 CIR-L 100 0.00 1000 1000 0 0 0.5 2 CIR-L 40.00 0 0 0.5 2 3 0.00 4 20.00 1 CIR-R 100 0.00 1000 1000 0 0 0.5 2 CIR-R 0.00 0 0 0.5 3 3 0.00 4 20.00 () 2 Step3 90mm 50mm Step2 10mm Step1 30mm 1 69 No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (2)DRIVEON No.1 (3)No.1 ON (OUT0ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INPOFF (1)(9)(17) IN0 (5)BUSYON (1)(9)(17) IN1 PLC (6)DRIVEOFF

Compact

Note 10) A reference value for correcting an error in reciprocal operation. 13 800 14 900 15 1000 Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Air Slide Table

64 32 14 31 13 18 Extension stroke end adjuster Retraction stroke end adjuster F 0.5 Adjustment range E Adjustment range C F MXQ8B 45 27 16 26 15 11 MXQ12B 50 28 15 27 14 13 Max.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

Compact Cylinder with Air Cushion Series RQ

A A' A' R H R H e When air is supplied for piston extension, the check seal opens and the piston starts with no delay.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Soft Start-up Valve AV2000/3000/4000/5000 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Selection Caution on Design Warning 1. Voltage leakage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, use cation that leakage voltage will increase due to leakage current flowing through the C-R element, etc. Caution 1.

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Modular Type Lubricators Series AL

Flow for Oil Drip 650 1800 Oil Capacity (cm3) 500 500 Model A B C Pipe Size Flow Rate ln/min 12500 16500 NAL800 100 283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT CONSULT SMC CUSTOMER SERVICE Large

VHK

P port size SlA 04F 06F 08F 10F 12F 4 Knob color 6 VlA Blue Gray A port size 2 port valve 3 port valve (Standard) 8 10 04F 06F 08F 10F 12F 4 2 port valve 3 port valve R (Option) Red 12 6 M5 M5 X 0.8 8 10 VM/VR 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) 12 VH M5 R(PT) M5 X 0.8 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) R(PT) R(PT) R(PT) Standard 1(P): One-touch/2(A): One-touch 1(P): One-touch

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

ZP3

Form w 1 Material e r Vacuum inlet M3 x 0.5 2 3 Connection thread N S U F GN GS ZP3 Y 015 02 035 U 14 B3 B3 7 0.82 Dimensions Per Vacuum Inlet: One-touch Fitting Model A B C Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia. Form w 1 Material e r Vacuum inlet Vacuum inlet: One-touch fitting Connection Applicable tubing O.D.

VZS

Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.