Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-89 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port side R1,R2 Port M5T M5 0.8 M5 0.8 R1,R2 Port M5 0.8 N3T One-touch fitting A, B Port M5 0.8,N3T P Port NPTF P Port NPTF A, B Port M5 0.8,N3T How To Order: Flat Ribbon Cable Manifold Type 21P (4 Port/Body Ported Type) Applicable valve: SYJ3 23 LOU --M3 SYJ3 23Y LOU --M3 5 6 5 6 AB Port M3 0.5 SS5YJ3--21P-07 00T Applicable connector ass'y: SY3000-37-28A (For 2

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Vacuum Ejector with Solid State Timer, Series ZMA

M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead

Vacuum Ejector with Solid State Timer

Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting

ZMA

diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)

Air Cylinder NCX2 Series Slide Unit

Eack (white) lead wire: connecl lo load (to lhe inpul of squence conlroller and outlel 3 wire sltlsn (l44ren povt sqroe lor s* bh and bsd is n01 conmofll Brown^{Red) I Pm]ffie,'e-| ' Elue.IBlack)L.: . Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H.

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

NCX2 seies

Eack (white) lead wire: connecl lo load (to lhe inpul of squence conlroller and outlel 3 wire sltlsn (l44ren povt sqroe lor s* bh and bsd is n01 conmofll Brown^{Red) I Pm]ffie,'e-| ' Elue.IBlack)L.: . Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H.

EXxx-OMU0020CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 3 4 SI 5 . 11 11 No.EX-OMU0020CN 2. . 2-1 EX245 DC24 V 1 msec IP65 CE RoHS AC500 V1 FE DC500 V10 M FE -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 2 XYZ 3 () 147 m/s 12 No.EX-OMU0020CN 3. 3.1. 8 VQC4000 7 2 x M5 ( = 1.5 Nm) 2 x M5 (SI = 1.5 Nm) 4 x M* . 3-1 13 No.EX-OMU0020CN 3.1.1.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

SMC Electronic Switch Series Variations

Gap too small Green 2 a Place the gap gauge on the detection nozzle for precise adjustment. s Confirm applied air pressure.

ZISE40A.eng

(-) 1 s Display to show the pressure range Thank you for purchasing the SMC ZSE40A(F)/ISE40A Series Digital Pressure Switch.

EXxx-OMW0014CN

LED EX245-DY1 LED(8 )(07) 07 OFF OFF ON ON ON . 8-2 EX245-DY1 LED 54 No.EX-OMW0014CN-A 8.6. EX245-DY1 4M12(5 ,) (n+1) (n) FE/ 24 V(/) 0 V(/) 24 V(/) 0 V(/) FE . 8-3 EX245-DY1 55 No.EX-OMW0014CN-A 9.

High Purity Fluoropolymer Needle Valve Series LVN 1

1 High Purity Fluoropolymer Needle Valve Series LVN How to Order LVN 2 S 0 07 Symbol Body class Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Orifice dia. 4.4 8 10 Body class 2 3 4 2 3 4 Port B (OUT) different dia. size Symbol Nil Application Port A & B same size

Air Suction Filter With One-touch Fittings Series ZFB 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 16 1 4 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 20 22 20 22 30 30 75 40 100 62 1 4 Metric size(2) 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop.