High Vacuum Angle Valve, XL Series XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XA47 S, Y J, K, T J, K, T J, K, T J, K, T Shaft through-hole + Shaft-end female thread Shaft through-hole + Shaft-end female thread Shaft through-hole + Shaft-end female thread These specifications are not available for rotary actuators with auto switch unit and angle adjuster.
Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.
HRGC001--J HRGC002--J HRGC005--J Applicable model Built-in ball tap for automatic water supply 0.2 to 0.5 2 or more (at 0.2 MPa) Water supply method Water supply pressure (MPa) Ball tap Water supply capacity (l/min) Automatic water supply inlet Rc1/2 Option symbol K With External Switch Inlet Option combination ( : Available, : Not available, : Possible, but specification needs to be modified
(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6
5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide B 136 172 176 252 265 Metal bowl B 66 97 142 178 182 258 271 Metal bowl with level gauge B 162 198 202
5.6 22 Per hour [J] 56 220 Lock looseness at servo motor shaft (Note 5) [degrees] 2.5 1.2 Number of lockings [times] 20 Lock life (Note 3) Work per locking [J] 5.6 22 For the suppressed voltage 145 V TND20V-680KB (135[V]) Selection example of surge absorbers to be used (Note 7, 8) For the suppressed voltage 370 V TND10V-221KB (360[V]) Note 1.
A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1
24 Cushion pad 23 The hexagon socket head set screws are tightened at different positions depending on the position of the connecting port. 10 Series MSQ Dimensions/Size 1, 2, 3, 7 Basic type/MSQBA BJ 2-JF depth JG WB effective depth WC BI 8-WD depth WE (Circumference: 8 equivalents) 4-JJ depth JK 1 WA 1 XA JA depth of counter bore JB 2-J through 22.5 BE XB effective depth XC WF BD BA 2-
J wRefer to p.5.3-68 for the details.
Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)
MXW8 MXW12 MXW16 MXW20 MXW25 Applicable slide table 0.98 2.94 5.88 19.6 58.8 Max. absorbing energy (J) MX 5 6 7 12 15 Stroke absorption (mm) 0.05 to 5 Max. collision speed (m/sec) Max. operating frequency (cycle/min) MTS Stroke adjustment 70 80 80 45 25 422 245 245 814 1961 Max. allowable thrust (N) MY 1.
Individual -X 155 Series MXW MXW8/Stroke: 25, 50 mm Operating port 2 x M5 x 0.8 J 10 Width across hexagon socket hole 2.5 5.5 Note) If long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions.
G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data
M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234
Auto Switch Mounting Height (mm) D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BA D-F5NT Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-M9V D-M9WV D-M9AV D-A5 D-A6 D-A59W D-A9V D-P4DW D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Bore size 32 40 50 63 80 100 125 24.5 23 35 67 27.5 77 27.5 27.5 24.5 25.5 23 32.5 23
7 35 Rod end male thread 6 x M4 x 0.7 thread depth 5.5 3 H9 (+0.025 0 ) depth 3 M8 x 1.25 Width across fats 174 16 23 MD XX 5 Width across fats 22 15 MC ML + Stroke 13 14 24.5 Required Space5 [mm] 4 3 H9 (+0.025 0 ) 3 Cable connector type J Straight 115 XX (2:1) 1 The range of movement of the rod according to the movement instructions.
67 83 H2 46 56 68.5 L1 3 6.5 10.5 13 13 23 28 32 36 16 19 23 15 16 22 14.5 16 20 6 4 10.5 42 51 59 16 23 27 220 280 340 12 17 8.5 Rc1/16 Rc1/16 Rc1/8 206 264 322 37.5 47 59.5 5.5 6.5 8 7 8 9 12.5 16 19.5 Model MY1H25 MY1H32 MY1H40 17.7 17.7 24.4 29.3 29.3 38 27.3 27.3 35 Hole Size for Centralized Piping on the Bottom R (Machine the mounting side to the dimensions below.)
Body Size: 100 (M5 Basis), Applicable Tube OD: 01 (Ø1/8"), Lock Nut: J (Round)
Body Size: 100 (M5 Basis), Applicable Tube OD: 03 (Ø5/32"), Lock Nut: J (Round)