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(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.
Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series
[ Kit Requires for S kit SOO'.
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115
P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?
Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/4, Option: None, Types of
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/8, Option: None, Types of
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/4, Option: None, Types of
Size: 2 (1/8, 1/4 Basis), Style 2: 1 (Meter-in), Port Size: 02 [Rc(PT) 1/4, R(PT) 1/4]
Size: 2 (1/8, 1/4 Basis), Style 2: 1 (Meter-in), Port Size: N01 [(NPT)1/8,(NPT)1/8]
Size: 2 (1/8, 1/4 Basis), Style 2: 1 (Meter-in), Port Size: N02 [(NPT) 1/4, (NPT) 1/4]
S kit can be used by connecting to gateway unit.
With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6
Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.
(10G) in X, Y, Z directions for 2hrs. each (deenergized) 980m/s (100G) in X, Y, Z directions 3 times each (deenergized) In a temperature range of 0 to 50C, 2% F.S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female