MHY2/MHW2

0 0 MHZJ2 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 Operating time (s/90) Operating time (s/90) Operating time (s/90) MHQ MHY2-16D MHW2-25D 3.0 20 MHL2 2.5 Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 15 2.0 MHR 10 1.5 MHK 1.0 5 MHS 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHC2 MHY2-20D MHW2-32D 6 50 MHT2 5 Moment

IIIIIIIIII

8" NPT ports 0-30 PSI, 1/8" NPT ports 0-60 PSI, 1/8" NPT ports 0-100 PSI, 1/8" NPT ports S-5300-10S-5300-30S-5300-60S-5300-100XX XX XX XX ADJUSTING OPTION NOTE: PRESET VERSIONS AVAILABLE CONTACT FACTORY W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT Back to Top .

SX

ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

Plug-in Unit

Description Function SV24V R +24 V solenoid valve 1 0 0 3 5 2 0 0 0V solenoid valve SV0V 2 BUS 3 1 1 12 +24 V SI and input blocks SW24V 3 1 1 X 4 1 2 2 P 0 V SI and input blocks SW0V 4 PWR 3 3 Ground connection E 5 1 PROFIBUS-DP: M12...5 pins (Plug) Example of the cable set with socket: SMC: EX500-AP...S (See page 2-2-25.)

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Ionizer

(mm) Distance (mm) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.3 MPa (14 L/min (ANR) per nozzle) 20 15 Discharge time (s) Discharge time (s) 15 10 10 1 Hz/60 Hz 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.7 MPa (30 L/min (ANR) per

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

CC-Link-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.

CNS

ON ON OFF Forward Backward OFF Locked stop OFF OFF Regulator with check valve 0.5 s or more OFF Unlocked ON OFF 0 to 0.5 s 3 port normally closed OFF ON Forward ON Pressure center ON ON Backward OFF OFF OFF Locked stop OFF SOL.A SOL.C SOL.B 0.5 s or more OFF ON OFF Unlocked 0 to 0.5 s ON ON OFF Backward 2) [Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) .

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12

Rotary Table/

0 y !5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

MXQ

1) 0.1 mm for 75 mm or longer stroke 4 to 0 4 to 0 6 to 0 10 to 0 12 to 0 Bore size (mm) 8 12 16 20 25 D50 to 500 mm/s Piston speed Holding force (N) 25 60 110 160 250 Table (1) B Side Parallelism to A Side -X (mm) Note) For caution on end lock, refer to page 8-5-7.

MK

0.052 0 0.052 0 0.062 0.1 0.15 5.5 48 65 8 0.1 34 0.15 56 21 M6 x 1.0 5.5 54 72 8 40 62 28 M6 x 1.0 MK(2) 35 50 63 0.1 0.15 6.6 67 89 9 0.1 50 0.15 76 M8 x 1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G

VM

Rc NPT G Function 0 1 2 3 position closed center 3 position exhaust center 2 position Flow Characteristics VH200 VH300 VH400 Effective area S = 55 mm2 Effective area S = 7.5 mm2 Effective area S = 20 mm2 Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Valve

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

of impacting object (m/s) m: Weight of impacting object (kg) F : Cylinder thrust (N) g : Gravitational acceleration (9.8 m/s2) s : Shock absorber stroke (m) Stroke Adjusting Unit/ Fine Stroke Adjustment Range s (mm) m Bore size (mm) Fine stroke adjusting range (mm) 16 0 to -10 25 0 to -12 1 2 Note) The speed of the impacting object is measured at the time of impact with the shock absorber

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread