MU

5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

25

0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Rubber Seal Series SY100 1

mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking lever type H: 600 mm lead wire LN: Without lead wire LO: Without connector MO: Without connector L P 1 4632 LN and MN types are with 2 sockets.

VDW

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

MXS

MGC MGF CY1 q B MY1 Normally ON w * Adjust the switch position according to load and speed.

MXS Series Air Slide Table

0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 50 Air Slide Table MXS Series Option Specifications Dimensions of Stroke Adjuster at Extension End (mm) Adjustable

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Air Cylinder NCQ7 Series Compact Cylinder

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

asilltr

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

e-Rodless Actuator

Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch

Thermo-chiller/Rack Mount Type

300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.