Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

10 1011Head flange (G): RECG 2 x P (Rc, NPT, G) NN H2 Width across flats B2 4 x 7 H1 G Relief port M5 x 0.8 G Standard port Mounting hole Width across flats B1 I Relief port Eh8 D FY B B AL MM K NA A FX N F N FZ S + Stroke FT H ZZ + Stroke Z + Stroke 40 Standard port 2 x 7 Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Modular Type Filter Regulator Series AW

Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

IDG

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

ZX

Manual override (Non-locking) Bracket B (Standard accessory) (Mounting hole) Bracket B (Standard accessory) (Mounting hole) Supply valve Release valve Release valve Supply valve N.O.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Series AP3100

B A B B 45 45 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 1.0 (25.4) 1.0 (25.4) AP3650 AP3657 1.88 (47.8) 0.44 (11.2) 3.02 (76.7) 0.13 (3.3) 0.4 (10.2) 1.87 (47.5) A B B 0.44 (11.2) 3.6 (91.4) 45 1.0 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) A B B Connections A B inch inch (mm) (mm) FV4 MV4 TW4 FV6 MV6 TW6 FV4 MV4 TW4 FV6 MV6 TW6

Microspeed Cylinder

B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.

MXW

Nil B Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

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B ZZ -t2 xstrokes.1 12 + 2X!