Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

CXT

state switch HS A B D-F7V D-J79C D-F7WV D-F7BAVL D-A7 D-A80 D-A73C D-A80C D-A79W 32, 40 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) 7.5 (1 row per side) B D x 150 (= E) 15 15 5H9 (+0.030 0 ) depth 56 150 n x 5.5 60 5 5H9 (+0.030 0 ) depth 56 5H9 (+0.030 0 ) depth 56 6 10 G 25 Motor option: With lock Cable length 250 (146) 65 20 24 15 Lock cable Motor cable *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

JIS Symbol Not required Lubrication 2 position single Push type/Locking type (Tool required) Pilot valve manual override (A) 4 (B) 2 (2) 30/150 m/s2 Vibration/Impact resistance Dust tight Protection structure 1 (P) 5 (R1) 3 (R2) 12 VDC, 24 VDC Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Latching) (A) 4 (B) 2 (A) 4 (B) 2 Equivalent to class B Coil

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

NCA1

Female Rod End B .

Special Specifications:

HA AT Series AME, AMF ID 250 CA A AME AMF AMG AFF Body size AM 150 250 350 450 550 650 850 Misc. 14-20-59 Series AFF-CA, AM-CA Dimensions Series AFF, AM, AMD, AMH, AMG Size: AFF2B to 37B, AM150 to 650 (B) (B) (B) (C) (A) (A) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Electric Actuator / Slider Type 《 AC Servo Motor 》

B A Auto switch mounting bracket A-A B-B Dust seal band type Seal band holder roller specification C No.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

Series AP500

(66.5) 40 0.28 20 0.14 0 0.00 0.69 (17.5) 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) A AP1200FC Inlet pressure:150 psig (1.0 MPa) 3/4 inch connections ) B 80 0.55 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) 0.88 (22.4) 70 0.48 Connections A B Delivery pressure (MPa) Delivery pressure (psig) inch (mm) inch (mm) 60 0.41 3.70 4.00 3.46 (94.0) (101.6) (87.9) FV4 MV4 TW4

MGQ

Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No. q w No. !

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Type Nozzle model Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Nozzle size Standard type Nil 01 02

Series CE1

OUT OUT Proper Auto Switch Mounting Positions (Stroke End) Proper Auto Switch Mounting Positions(Series CE1) Auto switch (mm) Bore size (mm) Auto switch model Symbol 20 32 40 50 63 12 A B A B A B A B A B A B A B A B A B 40.5 47 55 79 82 85.5 D-A7, A8 4 13 17 39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

MLGC

A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30)