Air Cylinder

(A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Table of Contents

C D E F Dimensions Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MLGC

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

MLGC

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

RB/RBL/RBQ

Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

CEU1

ROM E ROM6.5 E ROM OUT 0.0 0.0 (100ms) MODESHIFTSET DATA No.SET MODE No.

CY1F

Determination of loads kinetic energy (E) bore size Determination of bore size Review of larger bore size E Es E Es E = m E 2 a ( ) 2 (Refer to page 29) 1000 P Ps P Ps Determination of pressure for intermediate stop (p) (Refer to page 29) Review of larger bore size and operating pressure Model determination 1 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F Types

Flow Control Equipment

In-line style How to Order 1F 12 K 400 AS JIS Symbol Option Body size K N None Hexagonal lock nut Electroless nickel plated 100 200 205 300 400 M5 1/8 1/4 3/8 1/2 Indicate symbols in alphabetical order if two options or more desired. Applicable tube O.D.

CYV

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

VQC

Refer to e.