Modular Type Filter Regulator Series AW IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
8 Piston rod B Rod seal e Aluminum bearing alloy NBR !
8 Piston rod B Rod seal e Aluminum bearing alloy NBR !
6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.
None e-con connector x 1 pc. Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.
2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50
Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.
70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V 1000 1 2 420 1000 1 2 E = W (-) 2 E = 1 (-) 2= 0.088 Find the kinetic energy E (J) of the load. Find the allowable kinetic energy Ea (J). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.
A-e Manifold block gasket 1 pc. Gasket is mounted.
IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.
2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0
[FSC] 1 [F 6] -38No.PS-OMM0006CN-E [F11] <> [F11] [F11] 1000 100 , [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]) 27[F 0] -39No.PS-OMM0006CN-E [F80] 30 <> [F80] 1 2 [F80] 1 OFF 1 2 30 () 2(ON) ON OFF -40No.PS-OMM0006CN-E [F81] <> [F81] [F81] 000 50 -41No.PS-OMM0006CN-E [F90] <> [F90] [on]() 1 [oFF] () [oFF]() 2 [F90] 1 43 -42No.PS-OMM0006CN-E
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.