MXW Series Long Stroke Slide Table

Operation direction B (Plug : M-5P) Operation direction 10.5 B A 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A Cross section AA (scale 50%) 4-M6 x 1 thread depth 12 3 x H G Bottom through hole 5.1 H 7 depth 5.5 6H9 +0.03 0 F E 6H9 +0.03depth 5.5 0 Model Z H G F E MXW16-75 270 45 71.5 112 83 MXW16-100 295 50 74 126 86 Note) Adjuster bolt Y shown in the section above is attached only on B type

LJ1H

LJ1 LG1 LC1 LX LC6D/LC6C Switches LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

NAAMS Standards Compliant

: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A023 ACA247M

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

N.O. 10-SYJ722M 10-SYJ714M 140(80) 1/8 Base mounted (With sub-plate) 10-SYJ724M 135(75) 136(76) 157(97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC.

Cylinder with Lock Series MNB

C ??

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20

Compact

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Modular Type Air Filter Series AF

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 30 AFM20/30/40 Dimensions Bracket (option) AFM20 L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30, 40, 40-06 Bracket (option) A D G F K M J C B E H OUT IN OUT Port size Min. clearance for maintenance AFM30: 50 AFM40: 75 P Drain AFM20 AFM30, AFM40, AFM40

NCA1

B AA A C FA G TT J LF + STROKE ZB + STROKE R WF TL TM TL E X119 Option (in) TD 0.001 0 Bore (in) MM KK A AA B BA C D DD E EA EE FA G J R TL TM TT UM UV WF Y LF P XI ZB 200 (2) 1 3/4-16 1 1/8 2.6 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 250 (2.50 1 3/4-16 1 1/8 3.1 1.5 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 1 1

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Swivels

Part Number A B C D E Hex Wrench Flats Dia.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.