Digital Flow Switch ) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal
dryer Applicable dryer Port size Rc E D D C A B Part No.
Insert D at the end of the manifold part number.
BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.
C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw
250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.
U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.
Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.
[mm] [s] 0 1 Pushing Absolute 9.00 0.50 2 500 2 Positioning Absolute 5.00 0.10 500 Controller Parallel input / output signals Flow chart (Reference) (1) Turn the SVON signal ON. (The motor is energized.) (2) Select/input Step No.1: Turn the IN0 input ON, and the "IN1"input OFF.
mm/s Caution CQM Minimum Stroke for Auto Switch Mounting (mm) Snap Ring Installation/Removal D-A9, D-F9WV D-M9, D-F9W D-M9V D-A9V D-F9BAL CQ2 No. of auto switches mounted 1.
C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700
to 500 kPa 50 to 500 kPa A sensor may be unconnected or miswired.
Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0
Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 300mm
Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 250mm
Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 100mm
Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 600mm
Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 700mm