Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

100

Vacuum break flow adjusting needle Silencer exhaust (Exhaust noise) (65 dB) (68 dB) (68 dB) Port exhaust ZL1 ZL3/ZL6 Suction: 100 L Suction: 300 L Option ZL1 ZL3 An adapter assembly is required for bottom mounting interchangeability with the existing model. * The mounting holes on the top and on the side are interchangeable as standard.

NCA1

rods; therefore, the use of oversized 3200 16 41 67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155 210 16000 9 34 57 75 110 142 188 HOW TO USE THIS TABLE 20 8 28 52 68

CRB2/CRBU2/CRB1

1/8 Rc 1/4 Size Axial ports Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Basic, Foot Mounting Volume (cm 3) Size: 80 Size: 100 Single vane (S) Double vane (D) Rotation Classification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 30 70 88 186 48 98 136 272 90 Size: 50 49 94 138 281 180 Standard 66 118 188 376 270 32 73 93 197 52 104 146 294 100 51 97 143 292 Optional 190 CRB1 68

REA/REB

Z (Example) Y59AZ Note 2) Solid state auto switches marked with a "" are produced upon receipt of order. 68 Sine Rodless Cylinder High Precision Guide Type Series REBH Max.

High Power Cylinder:

277 RHC MTS CC Rear flange 4-R chamfer GB Rc(PT)P NN GA FZ Rc(PT)P Width across flats NF FX 4-FD MM H1 I FW D ND NE NB FY C Effective thread NC E E 10 FTH2 NA B WH 10 JD N A K F N JC S+Stroke F H ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 H1 5 6 6 8 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

JA/JAH/JB/JS

MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68

RHC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H1 GB GA FZ FW FY FX FT FD F E D B A H2 Bore size (mm) Stroke range (mm) Eff. thread length 15.5 5 47.5 53.5 68 38 21 51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7

Compact Cylinder

Auto switch model 8 7 8 0.5 Lead wire length (m) 41 38 41 3 68 63 68 5 Auto Switch Internal Circuit D-M9N(V) Unit: mm Dimensions DC (+) Brown Mounting screw M2.5 x 4l Slotted set screw D-M9 Main circuit of switch Main circuit of switch Main circuit of switch Indicator light OUT Black 2.6 2.7 2.8 4 DC () Blue 22 500 (3000) D-M9P(V) 3.2 DC (+) Brown 6 Most sensitive position 22 500 (3000) OUT

C95

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flange style (F, G) Head side mounting (G) Rod side mounting (F) Rear double clevis D Head side single clevis style (C) Head side double clevis style (D) Bore size (mm) EW -0.2 -0.6 MR FB CD H9 XV Z TD e8 E1 R W MF ZF EB L XD UB h14 CB H14 TR AO AT XA SA AH AB L1 TL TM UW TF UF E2 48 55 68

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

142 + l 133 122 MB1 160.5 + l 148.5(156.5) + l 25 126.5(134.5) 57 56(64) 68 149.5 + l 138.5 127.5 159.5 + l 149.5(157.5) + l 32 127.5(135.5) 55 55(63) 65 149.5 + l 137.5 127.5 CA2 178 + l 164(173) + l 40 144(153) 65 60(69) 74 169 + l 158 149 206.5 + l 189.5(201.5) + l 72 67(79) 169.5(181.5) 84 50 194.5 + l 186.5 174.5 CS1 206.5 + l 189.5(201.5) + l 72 67(79) 169.5(181.5) 84 63 194.5 + l

CL

127 181 38 20 168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

90 130 186 34 45 65 93 18 24 32 50 88 112 162 226 5.5 6.5 9.5 10.0 Applicable cylinder Model Mounting direction w B2 A2 C2 D2 F2 K2 Q2 MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 36 46 68 100 58 80 114 166 29 40 57 83 30 40 55 80 68 92 130 185 10 14 19 23 5 6 8 9.5 Installation of holding bolt Slider (piston yoke) Pin Conical spring washer Holding bolt Tighting Torque for Holding

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M4 x 0.7 Depth 6 2-M5 x 0.8 CX 9 5.5 17 21.5 52.5 53.5 D25 25 27 5.5 26 27 -X 206.5 6.5 16 17 5 NS 10 12.5 25 Data 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke (mm) Stroke (mm) NS LA LB LT J 5 58 20 10 4 10 58 20 4 10 15 30 68 4 20

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

) 258-9200-www.stevenengineering.com Reed switch (2-wire, 3-wire) Solid state switch (2-wire, 3-wire) 2-color indication solid state switch (2-wire, 3-wire) Auto switch CX +1 0 mm Stroke length tolerance DMXP16 Theoretical Output -X (N) 20Operating pressure (MPa) Piston area (mm2) 0.2 Bore size (mm) 0.3 0.4 0.5 0.6 0.7 Data 6 28 6 8 11 14 17 20 10 79 16 24 32 40 47 55 12 113 23 34 45 57 68

5

Applicable bore size A A1 E1 LA LB MM ND NX NZ R1 U1 Included pin part number Retaining ring Split pin size Y-020B 20 46 16 20 25 36 M8 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-032B 25, 32 48 18 20 25 38 M10 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-040B 40 68 22 24 49.7 55 M14 x 1.5 12 16 +0.3 +0.1 38 13 25 CDP-3 3 x 18 L * A knuckle pin and retaining rings (split

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Refrigerated Air Dryers

. * The IDF370D standard type is equipped with a motor type auto drain. (131) Air Discharge IDF190D, 240D (68) Operating air pressure Air discharge without drainage 0.3 MPa 0.006 m3 per cycle (ANR) 0.5 MPa 0.010 m3 per cycle (ANR) 0.7 MPa 0.014 m3 per cycle (ANR) The motor type auto drain actuates for 2 seconds per cycle. The operating cycle is as follows.