XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

REA/REB

(h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5

REA/REB

(h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

0.4

4 25 pins (Top entry) (Integrated housing type) !1 !3 !2 r 15 pins (Upward side entry) 25 pins (Side entry) e u t 424 A Exploded View of Manifold Housing assembly and SI unit no. SV No. Manifold Part no.

ISO Standard Hydraulic Cylinder

S + Stroke M H CH2 CHA Stroke range Bore size (mm) MM A M MA C NA PJ D F NB SS G GA K P Y ZZ B E GB H J S V Z Related Products 32 25 to 800 18 15 46 18 12 23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3

ZP

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

CM2

28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CNG

f 8 l RLQ MLU e ML1C Dh + l ZZ + l + Stroke Z + l -X 20With rod boot Data Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

CNG

flats B1 PH MM 0 0.05 E 0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38

Cylinder with Lock Series CNG

(width across flats XA) PG PL Width across flats KA Width across flats B1 PH MM 0 0.05 E 0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA

VFR

] 23 [25] 46 [55] 31 [39] 31 [39] 56 [60] 5-Rc 3/8, 1/2, 3/4 (Piping port) [ ] = Rc 3/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

Table of Contents

r t y No. q w e r t y u i o !

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

10

surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces, same surface) 15 25 30 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 30 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-F5NT 1 10 25 30 D-Y59l

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the