l

Stroke (mm) Tube material Mounting bracket Bore size (mm) 125 Aluminum alloy Basic, Rear flange, Single clevis, Double clevis, Center trunnion Carbon steel Basic, Rear flange, Single clevis, Double clevis, Center trunnion Foot, Front flange Front flange 1000 or less 1000 or less 1400 or less 1600 or less 140 1000 or less 1400 or less 1000 or less 1600 or less 160 1200 or less 1200 or less

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300 mm/s (Refer to page 19.) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less 400 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High precision guide Double axes MY2HT

AC Servo Motor Driver (CC-Link Type)

Use the acceleration time constant of Point table No.1 as the acceleration time constant (msec) of Home 1200 for LEJS40 H Lead position return. Set the recommended value in the above figure.

DOT/J844 Nylon Tubing

Minimum Bending Radius (mm) 1/8 9.4 5/32 12.7 3/16 19.1 1/4 25.4 5/16 31.8 3/8 38.1 1/2 50.8 5/8 63.5 3/4 76.2 Minimum Burst Pressure (psi) at 24C (75F) 1000 1200 1200 1200 1000 1000 950 900 800 Material Nylon 12 (Polyamide) *Note: Recommended operating fluid and temperature range provides best performance and longest life.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !

Direct Solenoid

OPEFATING: Maximum Cycle Rate 1200 1200 360 360 360 360 115/50 12U.5o 150 150 Continuous Opration: (cycles per minute) Maximum Amtient Temperature (At maximum cycle rate and continuous run. For slou/er cyde rates and intermittent duty, consult factory) iiOUNTIiIG: Inlended for loot mounting or are llght enough to hang in a pipe line May be mounted in any posllion. 140.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Copper, fluorine and silicon-free + low particle generation Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol Nil 21 22 Relief type Vacuum suction type CXSL CXSM,CXSL TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port

MGF

Mounting from top Mounting from bottom Typical application Change of transfer direction Positioning Features 2 40, 63, 100 Series MGF Guide Table How to Order 63 30 Z73 MGF Guide Table Number of auto switches 2 pcs. Nil 1 pc. S Auto switch type Nil Without auto switch Refer to the table below for auto switch model numbers.

Guide Table Series MGF

Mounting from top Mounting from bottom Typical application Change of transfer direction Positioning Features 2 40, 63, 100 Series MGF Guide Table How to Order 63 30 Z73 MGF Guide Table Number of auto switches 2 pcs. Nil S 1 pc. Auto switch type Nil Without auto switch Refer to the table below for auto switch model numbers.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes,

CLA

I , ~ R. t:l' t y X BN N X Y 1 S + Stroke H LS + Stroke ZZ + Stroke Long Stroke Bore size Stroke ) (mm) range (mm) RT RV 40 501-800 50 601 1000 1001 1200 30 76 , 63 601-1000 1001-1200 40 92 80 751-1000 1001 1400 45 112 100 7511000 . . .

AZ1000

AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200

C95Series

1200 1 ,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 10 in 0.14 0.04 0.10 1600 1400 1200 1000 800 600 400 200 0 Clamping force (lbf) 0.7MPa 0.5 MPa 0.3 MPa 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 187 Model Selection 2 Slim-line power clamp cylinder mounting When using a hard stop Arm length L (Distance to a hard stop) Clamp arm Cylinder Shim q Upper hard stop Clamping block Clamp arm Unclamping

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

126 32 90 110 105 126 4 CKZT -X2797 -X2798 Dimensions: Clamp Arm CKZT25-A000 S-X2797 C R L L: Left 26 18 52 40 16 C: Center R: Right 200.1 2 x 4H7 through 200.02 (8) 28 2 x 6.5 through 93 44 10 200.1 5 CKZT -X2797 -X2798 Model Selection Relation between arm length and clamping force Arm length Clamp arm Shim Clamping block Extension arm Fulcrum Load cell Bore Size: 25 Bore Size:32 270 [1200

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CQ2

88 101 114 127 140 152 165 178 75 IN 45 75 106 16 25 86 115 129 144 158 173 187 202 216 100 OUT 60 101 141 32 131 173 193 214 235 256 277 297 318 471 576 152 IN 71 118 165 20 40 206 252 275 298 321 344 367 390 413 597 717 229 OUT 94 157 220 1139 50 405 441 477 514 550 586 622 659 951 369 IN 113 189 264 25 1213 1424 63 579 620 661 702 742 783 824 865 538 OUT 147 245 344 1064 1132 1200