ZX

Vacuum pad connection port M5 x 0.8 (or M6) Pitch = 21 13-2-61 61 Series ZX Ejector System/Unit Construction (Refer to below for unit replacement.)

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

XM, XY

(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

Compact Cylinder

D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

reduces flow setting time

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

JXCx-OMT0061CN

(1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150 D LED RWr0,bit F (LRUN) *2 ON PLC RWw0,bit 2:ON Ry0B: RESET ON OFF PC/TB Ry0B: RESET ON PLC PLC PC/TB PC:TB: <> 1-192 E <> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <

Floating Joint

Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40 1.5 191 61 96 16 36 28 70 118 49 3 71000 5.3 Technical Data 200 JA200-45-150-X530 45 1.5 191 61 96 16 36 28 70 118

Stainless Steel One-touch Fittings Series KG

A Weight (g) L1 L2 M D Q Part No.

VXD21/22/23

Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2

MGQ

Specifications D By-pass port dia.

Series KG Stainless Steel One-touch Fittings

A Weight (g) L1 L2 M D Q Part No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5 13-/22-MXQ12(L) 18.5 8.5 8.5 15.5 15.5 34.5 34.5 44.5 44.5 28.5 18.5 18.5 25.5 25.5 2.5 15.5 13-/22-MXQ16(L) 24.5 14.5 14.5 14.5 20.5 27.5 45.5

LECA6_C

LE ,, () EMG 1000 1 54 - /Best Pneumatics No UL ,UL1310 Class2 142 55 - 143. 90~100 DC24VSVON a) b) c) d) e) D 100 56 - 144. 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 57 - 145. 5 146. SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4.

LECP6_C

D (100 ) 14.4 1. 2. 3. 4. 5. 6. 7. 8. /-10603585% 57 - 14.5 5 14.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 / 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4.

Support Guide/11-LEFG Series

: Ball Screw Drive 11-LEFG40-S 4 x M8 x 1.25 thread depth 13 60 106 (170) 6H9 (+0.030 0 ) depth 7 58 74 6H9 (+0.030 0 ) depth 7 7 A (Table traveling distance) L (86) 13 61 90 13 85 68 53.8 (68) 33.5 31 Vacuum port Rc1/8 n x 6.6 76 B D x 150 (= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Note) Note) For the special voltages, please consult with SMC. 4-14-11 Body Ported 12 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 2 08 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) D DO Note) Note) Order DIN rail separately.