Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L2 [Out: IO-Link, Switch Output (N/P); Func: Switch Output (N/P); Monitor Unit Model: None], Option 1: N (w/o Lead Wire and M8 Connector), Unit Specification: M (SI Unit Only)

Cylinder, Compact. 268.00000 lb. 501.

Made to Order

16) 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 110, 120, 125, 150, 175, 200 MY3A MY3B MY3M 16, 20, 25, 32, 40, 50, 63 2001 to 3000 100 to 2000 10 to 75 10 CXS 2001 to 3000 100 to 2000 16, 25, 40, 63 10 to 100 15 CY3B 2001 to 3000 (25 to 40) 2001 to 5000 (50, 63) 25, 32, 40, 50, 63 100 to 1000 10 to 100 20, 25, 32 10 15 20 25 100 to 300 100 to 500 100 to 600 100 to 800 301 to 500 501

Refrigerated Air Dryers

500 IDF AB IDF BP BP Applicable air dryer Applicable air dryer Applicable air dryer Symbol Applicable air dryer Symbol Applicable air dryer Thread type 300 IDF1E Symbol Applicable air dryer 305 IDU3E 306 IDU4E 307 IDU6E 320 IDU8E, IDU11E 322 IDU15E1 336 IDU22E 337 IDU37E 338 IDU55E, IDU75E 500 IDF4E to 75E IDU3E to 15E1 301 IDF2E 302 IDF3E 303 IDF4E 304 IDF6E to 11E 316 IDF15E1 317 IDF22E 501

ITVH

Flat bracket assembly (including mounting screws) P398020-600 L-bracket assembly (including mounting screws) P398020-601 ARJ Power cable connector Straight type 3 m P398020-500-3 Right angle type 3 m P398020-501-3 AR425 to 935 Straight type cable connector Right angle type cable connector ARX AMR ARM L-bracket ARP Flat bracket IR-A Mounting screw for the body Mounting screw for the body Right

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Electrical entry Size CE/UKCAcompliant 20 30 2(OUT) G Grommet*1 V V 24 VDC 1 N.C. 1(IN) 12 VDC 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC r Seal material t Orifice diameter and port size GS Grommet with PCB (With surge voltage suppressor) V V Symbol Orifice diameter [mm] Port size Size 20 30 Symbol Seal material N NBR F FKM Aluminum body Aluminum body 301 3 1/8 V 302 1/4 V 402 4 1/4 V 403 3/8 V 501

Integrated Controller

1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501

Fluoropolymer Tubing Variations

series M, MS (Hose nipple type) M, MS (Hose nipple type) M, MS (Hose nipple type) Miniature fittings KF, KFG2 KF, KFG2 KF, KFG2 Insert fittings LQ series LQ series LQ series LQ series Fluoropolymer fittings : Very good : Good : Moderate The comparison table shown above was prepared based on a relative comparison taking the characteristics of each fluoropolymer tubing into consideration. 501

Refrigerated Air Dryer

IDFA4E to 75E AT Stainless steel IDFA100F to 150F IDF IDU IDF FS How to Order Dust-protecting filter set Foundation bolt set IDFA IDFA 500 IDF FL 209 IDF AB IDFB Applicable dryer Applicable dryer IDH Symbol 500 501 Applicable dryer IDFA4E to 75E Symbol 209 202 203 204 205 206 207 208 213 214 Applicable dryer IDFA3E ID IDFA100F to 150F IDFA4E IDFA6E IDG IDFA8E IDFA11E IDK IDFA15E1 IDFA22E

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

connector (L): 10-SYJ3143-L-M5 M8 Connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 64.3[66.5] 54.5[56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 563 for dimensions with connector cable. 501

Slider Type Ball Screw Drive/11-LEFS Series

Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30 LEF Up to 400 900 450 1000 500 1000 500 401 to 500 720 360 1000 500 1000 500 501

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501

Environment

When selecting the target model, refer to the horizontal work load in the specifications on pages 256, 265, 495 and 501, and the precautions. The regeneration option may be necessary. Refer to pages 234 and 235 for Required Conditions for Regeneration Option. Step 2 Check the cycle time. Calculate the cycle time using the following calculation method.

Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: E (Out 1: PNP; Out 2: Analog 1 to 5 V)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: E (PNP; Analog 1 to 5 V), Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)

Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: C (Out 1: NPN; Out 2: Analog 1 to 5 V)

CQS, low friction type, Mountings: basic, foot, front and rear flange, double clevis, Bore sizes: 12, 16, 20, 25mm, Strokes up to 50mm, Auto switch capable, Cyl, Microspeed, Dbl Acting, COMPACT CYLINDER, 501, 107 lb

Cylinder, Compact. 93.5 lb. 501.

Cylinder, Compact. 255 lb. 501.

Cylinder, Compact. 108.5 lb. 501.