Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 12 - LECSS LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

IDX-OM-W014

.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E

E-P HYREG ® Series VY1 1

-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)

VNH

PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

240

Note 5) The direction of rod end width across flats (12) differs depending on the products.

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

88 to 1000 to 1000 to 1000 Front flange type (F) 4-FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 190 211 237

MGC

9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

9 i i l : ; 1 : I .: i a ) : r : TApe 541,/ Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NWSJ 3S41i statrons-l M5 , B3T E ^ 12 Stations 5 7 8 10 1 l 12 13 14 1 5 16 17 18 19 20 L1 1.56 (39.5)1.97 2.38 (50) (60.5)2.80 (7i) 3.2 (8r.5)3.62 (92) 4.O4 (102.s) 4.45 (1131 4.8 5.2e (123.5) (134) 5.69 (144.5) 6.t0 6.52 (155) (165.5) 6.93 (176)7.34 (186.51 7.76 (197) 8.17 QA7.5, 8.54

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Fomulae L1 = 10.5n + 45.5 L2 = 10.5n + 63 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 66.5 84 112.5 123 77 94.5 125 135.5 87.5 105 125 135.5 98 115.5 137.5 148 108.5 126 150 160.5 119 136.5 162.5 173 129.5 147 175 185.5 140 157.5 187.5 198 150.5 168 187.5 198 161 178.5 200 210.5 171.5 189 212.5 223 182 199.5 225 235.5 192.5 210 237.5

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Basic Specifications Voltage 12 to 24 VDC 12 to 24 VDC No. of outputs for switch 2 outputs 5 outputs Analog output 1 to 5 V 4 to 20 mA Operating temperature 0 to 50C 0 to 50C Number of screens 3 3 Functions Front face: IP65 Others: IP40 Enclosure IP65 IP40 3 Step Yes Yes Wiring Connector Connector Compact Pneumatic Pressure Sensor PSE53m Compact Pneumatic Pressure Sensor PSE54m Low Differential

o

9 i i l : ; 1 : I .: i a ) : r : TApe 541,/ Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NWSJ 3S41i statrons-l M5 , B3T E ^ 12 Stations 5 7 8 10 1 l 12 13 14 1 5 16 17 18 19 20 L1 1.56 (39.5)1.97 2.38 (50) (60.5)2.80 (7i) 3.2 (8r.5)3.62 (92) 4.O4 (102.s) 4.45 (1131 4.8 5.2e (123.5) (134) 5.69 (144.5) 6.t0 6.52 (155) (165.5) 6.93 (176)7.34 (186.51 7.76 (197) 8.17 QA7.5, 8.54

o

9 i i l : ; 1 : I .: i a ) : r : TApe 541,/ Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NWSJ 3S41i statrons-l M5 , B3T E ^ 12 Stations 5 7 8 10 1 l 12 13 14 1 5 16 17 18 19 20 L1 1.56 (39.5)1.97 2.38 (50) (60.5)2.80 (7i) 3.2 (8r.5)3.62 (92) 4.O4 (102.s) 4.45 (1131 4.8 5.2e (123.5) (134) 5.69 (144.5) 6.t0 6.52 (155) (165.5) 6.93 (176)7.34 (186.51 7.76 (197) 8.17 QA7.5, 8.54

Suction Filter with Case FH99 Series

90 102 M10 x 1.5 Thread depth 12 5 133 340 10.6 14.4 115 Note) Both flange and thread connections are supported.

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

PF-OMM0004_C

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 1-5V 1-5V 4-20mA (HYS) ON OFF 90% , () () ,, ,, 10 L/min 10 L ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L -14No.PF-OMM0004-D ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D

CEx-OMI0064

10-1 10 8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

LX Series Compact Electric Actuators

r Note) Contact prolection circuit is required wnen connectng t 7 3 l C section detail Cross section BB Q tlccFio $liilB ToilB tiliilrflig[ RiddiU 0uiiles$nries D($ Specifications " ' I lxsrzgA: Stroke (mm) 50, 75, 100, 125, 150 Motof 2-phase stepping motor s-phase stepping motor Screw (mm) sg Lead 6 s8 Lead 12 68 Lead 6 eB lead 12 Max. pay load (hofizontal) 9kg 4.5k9 6kg 3kg Max. pay load