LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0001

AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5** B2401-P6** B2401-P8** 63 80 AS568-043V AS568-045V AS568-043** AS568-045** AS568-233V B2401-V85V 1 AS568-233** B2401-V85** B2401-P8V B2401-P10V 2 B2401-P8** B2401-P10

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

Table of Contents

0.3 mm2 x 25C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 None None None None None None None White Black Black Red Red Red Black Black White None None Black White White Red Red White None Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White Electrical wiring specifications P10

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

ZB-OM00301

mm 0.3 0.4 0.5 0.6 2 MPa 0.20.55 0.30.55 MPa 0.35 0.4 0.35 0.45 0.35 0.5 L/minANR 3.5 4 6.5 8.5 10 18 /minANR 2 3.5 4.5 7 kPa -85 -90 1 20.5MPa URL http://www.smcworld.com Best Pneumatics No.4 P877898 30m 2 130mm ZB1-PS-A ZB1-PS1-A ZB1-PS3-A PSE541 PSE543 0-101kPa -100100kPa 500kPa DC15V 1k DC1024V10P-P10 15mA 2FS 25 0.4FS 0.2FS 0.8FS 2FS25 O HNBR 2 3 3m0.9mm 2.7X3.2mm

ITV-E

O PERATI O N M AN U AL E/P REGULATOR M O D EL N AM E ITV1000, ITV2000, ITV3000 series Seri es CO N TEN TS Cont ent s P1 Saf et y i nst ruct i ons P2 H andl i ng precaut i ons P34 W i ri ng m et hod P56 Set t i ng m et hod P78 M anual adj ust m ent of gai n and sensi t i vi t y P910 Sw i t ch out put P10 Key l ocki ng f unct i on P11 Reset f unct i on P12 Error i ndi cat i ng f unct i on P12

Profi-E

M O D EL N AM E I TV1000, I TV2000, I TV3000 seri es Seri es For PRO FI BU S CO N TEN TS Cont ent s P1 Saf et y I nst ruct i ons P2 Precaut i ons f or H andl i ng P34 W i ri ng and LED di spl ay P56 M ount i ng and I nst al l at i on P6 Sw i t ch set t i ng P7 Pressure set t i ng P8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons P910 M ai nt enance and i nspect i on P10

CC-Link-E

LATO R M O D EL N AM E I TV1000, I TV2000, I TV3000 seri es Seri es For CCLi nk CO N TEN TS Cont ent s P1 Saf et y I nst ruct i ons P2 Precaut i ons f or H andl i ng P34 W i ri ng and LED di spl ay P56 M ount i ng and I nst al l at i on P6 Sw i t ch set t i ng P7 Pressure set t i ng P8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons P910 M ai nt enance and i nspect i on P10

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired Standards: CE, Pipe opening type (details): Quick Fastener P10