Direct Operated Precision Regulator Modular Style Series ARP3000 1

0 1315506A 1315516-2 MYN-5 JIS B 2401P6 131545 1315513 131532 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Panel mounting hole Flow rate (/min (ANR)) Thickness max. 3.5 Caution Pressure gauge (Option) Port size 1.

IC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Series IC VEX Series ITV AMR External pressure sensor ITV IC VBA Note) Feedback control function is not available.

VER2000/4000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight 1.24 kg Rc 3/8, 1/2: 2.20 kg, Rc 3/4: 2.81 kg Note 1) Set the inlet pressure by 0.05 MPa or larger than the required maximum set pressrue.

Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

VCB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact: Single valve volume reduced by 15% (Class 3) VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

VXZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact, lightweight and large valve capacity Diaphragm VX3 ! VXA VN Wide variations enables a wide range of fluids control.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CA BA 0 0.3 BA 0 0.3 Drawing of view (E) (mm) Bore size 20.5 20.5 9.5 9.5 NA Z 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 CA GA BA CB GB 5 5 H NB S FB 17.5 19 FC 5.5 5.5 FT 2.3 2.3 FX 33 33 83 82 M5 x 0.8 M4 x 0.7 MM FY 20 20 FZ 42 42 GC F D BB A 55 54 M12 x 1.0 M10 x 1.0 NN 28 28 17 20 With air cushion With air cushion type is not available for 21-/22-CJ2.

Rotary Actuator

CA MSU CU Auto switch CRJ 8 x J (Opposite side 4 locations) CRA1 CRA1 SU (Max.)

AFF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to Made to Order Specifications on pages 14-20-55 to 14-20-57.

AMH

Drain cock: Gray Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch fitting N.C. auto-drain not available for AMH650.

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Port size Type of actuation Nil Without sub-plate VH Normally open Normally closed 2 1 M5 port with sub-plate M5 VHS How to Order Manifold Base Same manifolds as Series SYJ300 are prepared. SS3YJA3 Fill the same as SS3YJ3.

TA301

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Model Model VOA301 Applicable manifold model Common/lndividual exhaust Accessory (Part no.)

VT325

V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Grommet VP Exploded view VG VP (1) Bleed groove Bleed port on main valve (4) S070 (7) VQ Bottom of the solenoid valve (5) VKF 2.

VFRA3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.

VFN2000N

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS Symbol Single solenoid VZS 4 2 VFS Rated voltage VS4 5 1 3 Double solenoid Electrical entry VQ7 4 2 Apparent power AC (Power consumption) EVS 5 1 3 Electrical entry VFN Note 1) Use dry-air at low temperature.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

M6 x 25 AXT335-12-3 AS568-015 Hexagon socket head screw Gasket O-ring i o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Part no.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Safety Instructions

Supply voltage Internal voltage drop of switch Voltage of operation load > Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.