CLA

:::h i=ch 40 50 80 63 100 ! ~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

XM, XY

/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

CL

27 30 31 37 40 35 35 39 36 45 45 60 60 75 75 75 84 90 98 116 126 98 98 106 16.5 16.0 16.0 18.0 18.0 40 40 40 8 0 0 0 0 59 66 66 80 81 133 133 141 223 245 262 305 324 399.5 408 444.5 9-3-7 40 Series CL1 Axial Foot Style (L) 40 to 100 Lock-up at piston forward Lock-up at piston backward A B Rc BP lock-up port Unlocked when pressurized Rc BP lock-up port Unlocked when pressurized B A S

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

Vacuum Unit

A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC

CY1

Series CY1R Size: 6, 10, 15, 20, 25, 32, 40, 50, 63 When auto switches are added to the basic type. When used without a guide for a light load. (Application Example 1) When space is very limited. Series CY1S Size: 6, 10, 15, 20, 25, 32, 40 Smooth operation is possible through the use of a special slide bearing. To ensure a permanent path. When used for general transporting.

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

Table of Contents

ASN AQ ASV AK ASS ASR ASF 15-15-5 1 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ Air consumption reduction ratio (%) 40 Working stroke pressure (MPa) 40% reduction in air consumption 40% reduction in air consumption 30 0.9 0.7 20 0.5 10 0.3 Cuts air consumption by operating the return stroke at a reduced pressure.

Series SV

6, N7 8, N9 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 N3 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 N3 U side D side L3 (L4) 2-M2.6 2-4-40 UNC [A, B with inch size ports] (5.3) (4.9) 7.9 8 44.5 43.1 B B B B B 5.5 16.6 35 115.5 102.9 71.5 27.3 A A A A A 42.3 39.5 A B A B 69.1 JIS-X-5101 MIL-C-24308 Equivalent to applicable D-sub connector {

Environment

of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 25C or less 85 or less 100 For vertical loads (upward), set the pushing force to the maximum value shown below, and operate at the work load or less. 40C 65 or less 100 85 50 15 Model LEY16 LEY25 LEY32 LEY40 LEY16A LEY25A Lead A B C A B C A B C A B C A B C A B C LEY40 1100 Work load [kg] 1 1.5 3 2.5 5 10 4.5 9 18 7 14

SYJ3000/5000/7000

One-touch fitting) For M5 (Pitch) P = 12.5 19.5 M5 x 0.8 (A, B port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting

Thermo-chiller

Applicable model Dimension in [mm] A B C HRS100/150-A-20/40-A 32.7 [830] 11.9 [302] 61.1 [1552] HRS100/150-W-20/40-A 22.4 [570] 15.8 [401] 53.5 [1353] C 118 A B Option symbol With Earth Leakage Breaker B HRS 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A H H1 I J K KA MM NA P TA ZZ AL B1 C D E S TB F GA GB 24 20 25 32 40 50 63 80 100 15.5 19.5 19.5 27 32 32 37 37 8 10 12 16 20 20 25 30 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 14 16.5 20 26 32 38 50 60 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 10(12) 35 40 40 50 58 58 71

10

The overall length is longer than the cylinder with air cushion as follows because the bumpers are attached to the both sides of the piston; 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm Without Mounting Bracket Basic: (B) G 2 x Rc P G Cushion valve W V Port E A MM E D B C A' Section A-A' MB Width across flats B1 H1 ZZ + Stroke S + Stroke H A F N MA AL N 2 x 4 x J B C [mm] Bore size [mm]

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

VFR

B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust center Closed center 1 150 or

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size