SMC Corporation of America
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A 6% reduction of industrial CO emissions from 1990 levels is targeted for 2010. However, presentation of a plan for 10% or more reduction will be demanded.

20 <U side end plate assembly> L 52 30 10 U side end plate assembly part no.

a gripping force of 10 to 20 times the workpiece weight, or more.

a gripping force of 10 to 20 times the workpiece weight, or more.

range Actuation range A B Rotation range m 190 40 10 20 10 1 2 3 7 20.9 22.8 24.4 28.7 16.9 18.8 20.4 24.7 A A 190 35 10 20 10 190 30 10 15 10 When D-F9 is used 190 25 10 15 10 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Note 2) Vibration resistance: No malfunction resulted in a one-sweep test in a 10 to 300 Hz range in the axial and right angle directions of the main valve and armature, for both energized and de-energized states. Shock resistance: No malfunction resulted in an impact test using a drop impact tester.

-M9NL u Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

4.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (108.5) 10 A B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

A port B port (mm) A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 0 0.043 0.004 0.012 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 42 34.5 10 20 M5 x 0.8 1.5 17 7 10 0.5 36 M4 x 0.7 4.5 M4

side) EX600-EU1 End plate (D side) EX600-ED4 End plate (D side) EX600-ED4 EX600-WEN1 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

Check the dripping amount once a day. Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) For each body

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

valves because the generation of surge voltage is prevented by a rectifier. * For type U, only DC voltage is available.

Sea water u Corrosive to the product GALDEN u Electric conductivity is too low. Fluorinert u Electric conductivity is too low. Ethylene glycol u Electric conductivity is too low. Ethanol u Electric conductivity is too low. Methanol u Electric conductivity is too low. Chloride water (Hypochlorous acid) u Corrosive to the product 1. Never use in the presence of explosive gases.

CHN W W FY B D E d CHM CHS MA M a NB C CH2 F A K NA B S + Stroke FT H FX CHA CHA ZZ + Stroke FZ Related Products DWith rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C E D d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 9 10 77 44 95