Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Air Fittings & Tubing

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

Compact Cylinder

Without Magnet for Auto Switch AS121F-M3-04 V V AS121F-M5E-04A V V V AS121F-M5E-06A V V V Elbow type Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 10 or more 5 10 or more 5 or more Male connector (with hexagon socket head) AS131F-M3-04 V V AS131F-M5E-04A V V V AS131F-M5E-06A V V V Universal type KQ2S04-M3G V V KQ2S04-M5m V V V V V KQ2S06

Series AP500

The following procedures are an example of how a test may be performed. It is intended as an overview and not as an all inclusive description. 1) Rotate the adjustment wheel counterclockwise (DECR) completely to relieve spring force.

CQS

V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire Relay, PLC Grommet 24 V 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 12 V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Reed switches Solid state switches D-F9N (V) D-A90 (V) D-F9NW (V) DC (+) Brown [Red] DC (+) Brown [Red] Contact protection box OUT () Brown [Red] Reed switch Main switch circuit Main switch circuit OUT Black [White] OUT Black [White] CD-P11 CD-P12 OUT ( ) Blue [Black] DC () Blue [Black] DC () Blue [Black] D-A93 (V) D-F9P (V) D-F9PW (V) DC (+) Brown [Red] DC (+) Brown [Red] Brown [Red] LED

ARM10/11

(Full Span) Calibration angle 230 Limit indicator With limit indicator L side end block R side end block 17.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 28 SMC 56 56 SMC OPEN 1.5 20 7 7 20 28 18 26 26 18 22 32.5 32.5 R E V O C 14.5 Port Plug Bushing VVQ0 58A

ARM10/11

(Full Span) Calibration angle 230 Limit indicator With limit indicator L side end block R side end block 17.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 28 SMC 56 56 SMC OPEN 1.5 20 7 7 20 28 18 26 26 18 22 32.5 32.5 R E V O C 14.5 Port Plug Bushing VVQ0 58A

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

Series IDG

IDG 10 V 03 X017 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 60 75 100 5 Standard Nil R S 10 Flow direction (rightleft) 20 With dew point indicator Standard equipment 30 50 Drain discharge symbol 60 75 100 Port size Standard dew point Thread type Component equipment Mist separator Micro mist separator Membrane air dryer Micro mist separator regulator Size 3 Component

CLS

100 V Relay, PLC Reed switch Solid state switch A54 100 V, 200 V Yes A33 PLC 12 V Terminal conduit 24 V 2-wire A34 100 V, 200 V Relay, PLC A44 DIN terminal Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Grommet A59W Y59A 3-wire (NPN) IC circuit 24 V 5 V, 12V Y7P 3-wire (PNP) Grommet J51 100 V, 200

IDX-OM-M051

When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Environment

1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.