T

9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Single Axis Electric Actuator Series LJ1H

thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 1.7 4.8 5.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 8-6.6 92 9.4 4.5 10 58 30 Stroke + 216 18 T-slot dimensions The

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

Series PF2W Digital Flow Switch For Water

T 03 27 Flow rate range Unit specifications T Temperature range 04 20 40 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 0 to 90C With unit switching function Note1) Nil M Lead wire (Refer to page 322.)

CNS

Graph (1) 30 20 10 2.

Compact Type

32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

15

Be careful to the supply pressure and kinetic energy when performing an intermediate stop. Fine end stroke adjustment is considered as an intermediate stop, so the considerations for an intermediate stop must be observed when making any fine adjustments. When stopping the external slider in an intermediate position with an external stopper.

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.

ISO Cylinder

(n 2) (n = 4, 6) D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) D-F7lW D-J79W D-F7BA 10 15 15 + 20 (n 2) (n = 4, 6) D-M9lW 15 15 15 + 15 (n 2) (n = 4, 6) D-M9lA 15 20 20 + 15 (n 2) (n = 4, 6) *1 Auto switch mounting (With the stroke range within the below, an adjustment is required as shown in the chart below).

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[kg] Work load [kg] 11LEFS 2000 2000 1000 1000 11LEJS 800 800 1500 1500 m Me L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 L3 25A1000 1000 Z 400 400 500 500 LEC 200 200 0 0 0 0 LEC S 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

LX Series Compact Electric Actuators

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

VCC

Total valve number must be an even number. Note 2) Maximum valve number is forty (40) valves (colors) by total of w + e + t. Note 3) When Without gate valve is selected, use 2 port valve of w as a cleaning valve. 2. How to Order Valve 3. How to Order Blanking Plug 4.

MB

20 30 30 10.5 11 15 15 23 23 154 158 182 182 228 228 13 13 17 17 26 26 U CX L CZ Z + Stroke RR ZZ + Stroke Center trunnion: (T) Z+1/2 Stroke Center Trunnion Port (mm) Bore size (mm) Stroke range TDe8 TY TT Z TZ TX TDe8 32 40 50 63 80 100 TY to 500 to 500 to 600 to 600 to 750 to 750 49 58 71 87 110 136 12 16 16 20 20 25 17 22 22 28 34 40 89 93 105 105 129 129 74 95 107 130 150 182 50 63 75

LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

VQ5000

When mounting an interface regulator, tighten the bolts with a torque of 1 to 1.8 Nm. Pressure gauge SMC D P 1 D side 5 R1 3 R2 T PE Pressure Setting Caution 1. Set the pressure of an interface regulator using a flat head screw driver. 2. The pressure adjustment is increased by turning to the right and decreased by turning to the left.