VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

Cylinder with Lock

68 245 45 250 63 10 50 12 5.5 80 264.5 50 269.5 80 12 63 14 6.5 100 320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Double Acting, Double Rod Flange Rod side: CP96NF-W 4 x FB R E2 MF W TF UF Head side: CP96NG-W MF ZF + Stroke [mm] Bore size E2 FB MF R TF UF W ZF 32 50 7 10 32 64 79 16 188 40 55 9 10 36 72 90 20 211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63

Series SV

Mounting 20 Tie-rod base 20 stations Direct mount DIN rail mount (with DIN rail) DIN rail mount (without DIN rail) Nil D D0 D3 SS5V W 1 05 U 10CD Note) When a DIN rail longer than the specified stations is required. (Specify a rail longer than the standard length.) Cassette base For 3 stations SS5V W 05 16CD 1 U ... ...

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

Table of Contents

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

2/3 Port Valve

Power dissipation (W): For AC , W=V/A cos. For DC, W=V/A (Note) cos (Note) cos shows power factor. w Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. e Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Refrigerated Air Dryers

, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

0.4

M kit is available with [W] only. S/L/T kits are selectable depending on the manifold type. S VQC 1/2 VQC 4/5 Note 1) The !4s fitting assembly is included. Note 2) The housing assembly and SI unit of F/P/S kits are not included. Separately place an order for q, w, e.

Magnetically Coupled Rodless Cylinder

In this case, an intermediate stop can be performed only by using an external stopper, etc. Note 2) Depending on the operating environment, etc., order made products should also be reviewed. Note 3) An external guide system should be installed when over specifications. (Refer to page 6 for intermediate stops.) (Refer to pages 20 through 24.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

an option.

NCA1

, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order MOUNTING BORE STROKE SUFFIX NCDA1 W Ex: NCDA1WB 150-400 Auto-switch capable Double Rod Double Rod Basic Type NC A1WB (in) Bore (in) MM KK A AA B C D DD E EA EE G K LD P R WF Y ZM XT SD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

Thermo-chiller

Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) G 11 13 15 19 N 15 17 20 25 UU 118 139 167 202 D (g6) 15 17 20 25 M 20 22 25 30 L 14 16 19 24 Model CVRA1BW50 CVRA1BW63 CVRA1BW80 CVRA1BW100 Single Shaft Type (mm) DD (h9) D (g6) Valve dimensions VH Keyway dimensions b l S U CA C Model W B BA J K H CB A F VJ 144 (177) 163 (201.5) 186 (230) M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 CVRA1BS50 13.5 8.5 46 17 48 17 36 5

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series