3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

XL

Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 24.5 38 Symbol 3 port (83.5) 55.5 28 1.5 3 1.5 (A) 2 (A) 2 12 12 1 (P) 5 port (A) 2 (A) 2 12 12 47.8 37.2 R port (5 port only) 3 (R) 3 (R) 1 (P) 8.5 14 3 x M5 x 0.8 depth 4 17 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 12 A 2/3 Port Mechanical Valve Series VM200 RoHS Large flow capacity Specifications Possible to choose mounting method: Side mounting, bottom mounting using

Booster Regulator/Air Tank

Model VBAT20A1VBAT38A1 VBAT05A1VBAT5A-Y-3 VBAT-R (Set pressure: 1 MPa), VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A1VBAT10A-Y-3 VBAT20A-Y-3 VBAT-R (Set pressure: 1 MPa) Accessory kit Safety valve (When selecting an option) Note 1) 2) Drain valve (When selecting an option) Note 1) The set pressure of the safety valve cannot be changed.

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

33

20 [dm3] : 4.2 x 103 [J/(kgK)] : 305 [K] (32 [C]) : 293 [K] (20 [C]) : 12 [K] (= T0 Tt) : 900 [s] (= 15 [min]) Example of current measurement units (Reference) : Unknown [cal/h] [W] : Water : (= r x V) [kgf] : 1 [kgf/L] : 20 [L] : 1.0 x 103 [cal/(kgfC)] Heat quantity by cooled substance (per unit time) Q Cooled substance Cooled substance weight m Cooled substance weight volume ratio c

One-touch Fittings

Face seal fittings: R, NPT, G 1. Tighten fittings with sealant using the proper tightening torques in the table below. 2. Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2.

Compressed Air Preparation Filter

R V2 V1 Q1 Q21 Q1 C Y300T-D U E G Maintenance space 1 Q2 (Sizes 20, 40) Q1 (Size 30) AM30-03-D AMK30-03-D AMD30-03-D Standard specifications Optional specifications Bracket mount P A C E F G J M N Q1 Q2 R S U V1 V2 components Number of Model Size 20 2 1/8, 1/4 83.2 17.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 3 126.4 43.2 Size 30 2 1/4, 3/8 110.2 21.5 30 55.1 35 26.5 41 35 7 14 6 42.5

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

an M5 female thread is used.)

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

High Vacuum Angle Valve, XL Series

Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.

MGP

2 @2 r o e @4 !0 y !3 12, 16 under 50 stroke 12, 16 over 30 stroke !5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

15 12 170 80 80 50 50 12 5.5 10 185 190 90 20 20 87 28 97.5 129.5 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 110 20 20 110 34 110 150 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16 6.5 14.5 220 230 132 25 25 136 40 120 160 75 150 14 120 178 35 16 205 110 60 60 20 25 20 230 140 Max. 8 Max. 157 Max. 25 Max. 160 Max. 157 Max. 224 Min.