High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

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Diagram 2. veriical upward mounting (Uae Spring look-uP) g Y ; As compared with Diagram 3, this circuit employs s-port valve instead ot Sol A laving the othe( unchanged.

3 Port Air Operated Valve Series SYJA300

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Air Cylinder CLA Series Fine Lock Model

Diagram 2. veriical upward mounting (Uae Spring look-uP) g Y ; As compared with Diagram 3, this circuit employs s-port valve instead ot Sol A laving the othe( unchanged.

Sine Rodless Cylinder Series REBR Direct Mount Type

+ Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W 8 A N Z + Stroke Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Auto Switch Guide

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

and speed of 500mm/s.

ZQ-OM01401

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

3 Port Solenoid Valve Series SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 one-touch fitting F G R port N3 5/32" one-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Auto Switch Guide

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

are equipped with a lock).

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

50 4 3 6 16 22 46 40 M8 x 1.25 6 92 24 48 124 200 300 36 86 124 174 66 5 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB DB st50 50

CE

Therefore, a speed of 500mm/s is equivalent to 5kcps (kHz), but a counting speed 2 to 3 times greater is recommended for actual operation.

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 SMC A2 SMC J 27 H X A1 (mm) R (RC) F (h9) E (g6) H (R) U Model A1 J A2 B G2 V K M2 N C W L D X P G1 Y S Z T M1 Q CDRB1BW 5026 21 29 27 30 29 35.5 38 18 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 25 0 0.052 1/8 67 78 3 6.5 R6 11 32.5 70 34 5 32 66 13.5 39.5 46 50 5.5 60 6.5 R22.5 CDRB1BW 50-E CDRB1BW 63M8 x 1.25

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Table of Contents

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.