CQS

Rod end male thread 20, 25 Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 L1 X C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 10.5 15.5 12 18.5 14 22.5 17.5 Basic Style A B A B Without auto switch With auto switch Bore size (mm) Stroke range (mm) 5ST C I N OB D K OA RA E L RB F M T H 10ST 5ST 10ST 5ST 10ST 5ST 10ST 12 16 20 25 M3 x 0.5 15.5 M4 x 0.7 6 8 7 12 32 38

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

Refrigerated Air Dryers

11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Air Slide Table

A) MXQ12B 50 28 20 27 18 MXQ20(A) MXQ16B 57 31 20 30 19 MXQ25(A) MXQ20B 64 32 21 31 20 -X11 is not available for the MXQ6(A, B) and MXQ8(A, C).

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

T

Fixed end Burst pressure (MPa) Min. bending radius (mm) Note) 10 15 20 27 35 Air: 20 to 60C, Water: 0 to 40C (No freezing) Operating temperature Polyurethane Material Note) The minimum bending radius indicates the value at which the tubing will fold at a temperature of 20C. At a higher temperature, the tubing may fold at more than the minimum bending radius.

MB1

7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

MQQ

79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1E Union tee LQ1T Panel mount union LQ1P Union LQ1U Union elbow A A B A A 15 A B B B B 20 A 25 A Note 1) For each body class, the second and later numbers or symbols indicate reducing. However, in case of size 1, the tubing cannot be changed by reducing. Note 2) Sizes 1 to 3 are not available for the union flange Note 3) For Union flange, nut sizes 4 and 5 are as shown below.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Rotary Table/

, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 High Precision Type A F9B MSQ A 10 MSQ B 10 A F9B Basic Type Number of auto switch 2 pcs. 1 pc. n pcs.

Plug-in Unit

A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec.

High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

CNS

Extend the dimensions of A and H, when using a single/double knuckle joint together with a rod end nut.

Pin Clamp Cylinder Series CKQ/CLKQ

2 t u !1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !