Series KV2 Fittings

15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100/100 100/200 100/100 100/200 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation. 9 Series KV2 Male Branch Tee KV2T_ _-_ _S Applicable Tube A Applicable Tube

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Integrated Controller

B A A B B-B In-line motor Component Parts Component Parts (Top/Right/Left side parallel only) No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

One-touch Fittings

O-ring Body Seal Stud Can be used for a wide range of pressures from a low vacuum up to a pressure of 1 MPa. Effective when piping in a confined space. Body part rotates allowing for positioning. The use of a special profile ensures sealing and reduces resistance when the tube is inserted.

Thermo-chiller/Rack Mount Type

10 For Options T, MT: 15 Applicable earth leakage breaker capacity8 Rated current: 10 A For Options T, MT: 15 A Sensitivity current: 30 mA Electrical system Cable quantity x Size (Including grounding cable)15 3 cores x 14 AWG (3 cores x 2.0 mm2) Rated operating current (50/60 Hz)17 [A] 3.6/4.0 3.6/4.3 5.2/5.8 5.5/6.2 For Options T, MT 4.7/6.2 4.7/6.5 6.3/8.0 6.5/8.3 Rated power consumption

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2H40G-500 Average operating speed a 300mm/s Mounting orientation . Wall mounting 1. Horizontal mounting 2. Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

MLGP

A A A B 40 to 63: Over 100mm stroke 50 to 100 80, 100: Over 200mm stroke Extension locking (Type F) Retraction locking (Type B) Section BB Section BB Section AA Section AA Parts list Description Material Note Parts list Description Material Note Phosphate coated No. 1 2 3 4 No. 21 22 23 24 25 26 27 28 C type snap ring for hole Bumper A Bumper B Plastic magnet Parallel pin Spring pin Aluminum

MLGP

A A A B 40 to 63: Over 100mm stroke 50 to 100 80, 100: Over 200mm stroke Extension locking (Type F) Retraction locking (Type B) Section BB Section BB Section AA Section AA Parts list Description Material Note Parts list Description Material Note Phosphate coated No. 1 2 3 4 No. 21 22 23 24 25 26 27 28 C type snap ring for hole Bumper A Bumper B Plastic magnet Parallel pin Spring pin Aluminum

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Series LJ1 Top Mount (Using T-slots on the Mounting Frame) LJ1H20/LJ1S20 M6 bolt M6 bolt 33 33 2-T-slot Recommended dimension 8 (Refer to JIS B0952.) 20 0.02 A: Stroke + 124 A: Stroke + 32 92 0.02 A 92 92 A Positioning hole 2-8H10 4-T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30/LJ1S30 M8 bolt M8 bolt 30 30 2-T-slot Recommended dimension 8 (Refer to

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6 6 7 B 3 3 4 0 to 1 A B 20 25 32 D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL A 23 23 32 37 Bore size (mm) B 0 0 0 4 40 50 63 80 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Stroke for

CLQ

1 A B A' B' Without magnet Extension locking u t @5 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When shipped Section A-A' Retraction locking !0 !5 Section B-B' !3 !

CLQ

With auto switch Bore size (mm) A B A B 82 23 33 72 82 10 to 50 75, 100 33 32 Rod end nut 38.5 Rear flange type: CLQG32 54.2 48 34 7 32 B + Stroke 8 A + Stroke 4-5.5 65 56 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt

MQQ

D D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible mounting bolt dimensions Model A type mounting B type mounting C (mm) D: Bolt length (mm) Mounting bolt size E (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D M4 x 0.7 35 + Stroke

Thermo-chiller

physical property values by circulating uid. m x C x (Tt T0) x V x C x T Q = = t t 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (Tt T0) t x 860 x V x 60 x C x T t x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5