min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume perpulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Fluid temperature *3 0 to 85oC (No condensation or freezing
style Air cushion None With air cushion Nil C B L Basic style Foot style Flange style F For part numbers, refer to the tables below.
Size B L Basic style Foot style Flange style 50 63 80 100 F Auto switch For part numbers, refer to the tables below. For the applicable auto switch model, refer to the table below. Auto switches are shipped together (but not assembled).
L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D
GE MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K F A BN A H S + Stroke ZZ + 2 strokes H + Stroke CNA CNS CLS CLQ e e MLGP 13 13 RLQ 9 f f l + Stroke 9 l h h + Stroke MLU ZZ + 2 strokes ML1C With rod boot D-X Bore size (mm) Stroke range (mm) Effective thread
GE MNB K F A BN A H S + Stroke ZZ + 2 strokes H + Stroke CNA CNS CLS CLQ e e MLGP 13 13 RLQ 9 f f l + Stroke 9 l h h + Stroke MLU ZZ + 2 strokes ML1C With rod boot D-X Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats GL1 A B B1 H1 B2 BN BP C D Ee11 F GA GB GC GD GL 2032 40 50 63 80 100 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to
C E D GL W GL 1 T MA 4-J 4-J MB V Effective thread length H1 MA VA Q GF N F GE Effective thread length K F A A BN K H + Stroke H S + Stroke ZZ + 2 strokes e e 13 13 l + Stroke 9 f f l 9 h h + Stroke ZZ + 2 strokes With rod boot (mm) Width across flats Bore size (mm) Stroke range (mm) Effective thread length (mm) BP GL1 A B B1 H1 B2 BN C D Ee11 F GA GB GC GD GL 32 40 50 63 80 100 to 500 to
L Applicable bore size (mm) Applicable cotter pin Dd9 L l Part no.
lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E F Mitsubishi Electric Corporation 100W None Switch specification Yasukawa Electric Corporation 200W With brake Nil 1 2 3 4 5 6 7 A B Without switch
Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type 10 D L 6 60 R C J 2 M9BW C 21 D L 6 60 C J 2 R M9BW C Mounting Number of auto switches Nil S n B L F 2 pcs. 1 pc. n pcs. Basic Axial foot Rod flange Foot/Flange brackets are shipped together with the product, but not assembled.
40 150 A H7B 21 C D M 2 L 40 150 A H7B Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style B L F G BZ FZ 2 pcs. 1 pc.
For VX21: VVX21-3A-F For VX22: VVX22-3A-F For VX23: VVX23-3A-F Table (3) Rated Voltage Electrical Entry Electrical Option Class B Class H Rated voltage S L Z S L Z Seal material: FKM Voltage symbol Voltage With surge voltage suppressor With surge voltage suppressor With light With light With light and surge voltage suppressor With light and surge voltage suppressor AC/ DC How to Order Manifold
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.
) BP GB G G FA Unlocking port 2-Rc(PT) P Cylinder port Width across flats KA MM D EA E VA AL CX CZ CT N N U A K F BN L RR S + Stroke H ZZ + Stroke Z + Stroke 2-MA Effective thread depth R CL T GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX CZ D E EA F FA 125 140 160 50 47 145 205 1/2
l h h + L8 + H + 2 x Stroke With rod boot at both ends d d e e L8 + Stroke h f l l + Stroke f 2 x h + L8 + 2 x Stroke h + Stroke A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9 32 40 50 63 80 100 125 190 26 7 4 4 94 16 32 10 M10 x 1.25 6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35
C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C). Function : Sets upper limit of temp. which the internal temp. sensor detects and judges the unit should be shut off. When the temp. set in this item is reached, the alarm [ERR12] arises. L o w T e m p . C u t o f f 9. Low Temp.
(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.
(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.