1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

, , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Pneumatic Positioner IP300/IP3100

/cm'z 03 10kg /cnf 04 4 kgf/cm'?

•

Hysteresls mode When the values of Pl and P2 are the same or when PI > P2 within 3 diglls.the hysteresIs will be automatICally 3 digits for 1 he set value of PI. . WII1dow comparator mode .. Shock resistance 100G to X.Y.

Thermo-chiller

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC 3 q Ambient temperature

Stainless Steel Regulator Series NSR

Sliding parts which contact with lluid will not produce alry abragiv pdrvders. t{sR4000 Il[anufactured. ta meet Specificatbns cle an ro om s1t ecificatiotts. ]a, %, 1I NPT Proot Pressure: 22spsig Low pressure model1.5-30psig (0. 1-2kg cm,) pressure model7100psig (0.5-7kgf/cm,) Assembly is carried out in lhe clean room. (CLASS 100). Double fucking is used to prevent contamination.

-- NCM seies

NCf,IW NCDMW 'Noie: lf ordered do rubber bumper, orcrall length docreases .25 inches. o svE' Stainless Steel Cylinder Air Cylinder Series NCM Specifications 250 PSt(17.5 kgf/cm') 8 PSI (0.5 kgf/cm'?)

LEC-OM02704CN

PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. RY(n2)0RY(N2)13.6.2(3) 5. *1 *2 *3 1 3 1 1 2 3 1 1 1 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

Table of Contents

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

VFS

8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110 600 0.88 45 or less 2 position 3 position VFR 3 8 VP4 Double 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 VFS5200 VFS5210 600 1.06 25 or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

AC

, 3/8, 1/2, 3/4 Easy maintenance.

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1

LEC-OM02904

2.3 25 2.4 SSCNET 25 2.5 27 2.6 28 3 313-39 3.1 33 3.2 37 3.3 39 3.3.1 39 3.3.2 3-10 3.3.3 CNP1CNP2CNP3 3-12 3.4 3-19 3.5 () 3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

HEC_W-E

FIG. 2-1 THE POSITION OF ATTACHING WARNING LABEL AND CAUTION LABEL -2-3 FIG. 2-2 DETAIL OF WARNING LABEL AND CAUTION LABEL -2-3 FIG. 3-1 INSTALLATION ENVIRONMENT -3-2 FIG. 3-2 FOOT MOUNTING SCREWS -3-3 FIG. 3-3 MOUNTING -3-3 FIG. 4-1 POSITION OF MODEL NO. LABEL -4-2 FIG. 4-2 LEGEND OF MODEL NO.