Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 8 [Terminal Box (For 24VDC, -COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: Q (CE-compliant)

Set Flow: 1~10l/min, Thread: Rc(PT), Port Size: 1/2, Terminal Box: 8 [Terminal Box (For 24VDC, -COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: CE-compliant

CLS

66 82 70 102 CL1 82 98 86 Be sure to confirm operation after mounting.

Electric Actuator/Slider Type

Note 3) The Z-phase first detecting position from the stroke end of the motor side 34 Series LEFB Dimensions: Belt Drive LEFB40/Motor top mounting type 6H9 (+0.030 0 ) depth 7 (170) 106 Encoder cable (7) Body mounting reference plane Note 1) 4 x M8 x 1.25 thread depth 13 60 Motor cable (7) 58 74 7 7 8 M4 x 0.7 thread depth 8 (F.G. terminal) 6H9 (+0.030 0 ) depth 7 L (86) 66 86 97.5 A (Table

Table of Contents

K L DJ 20M5 x 0.8 (Finger closing port) G I M (mm) G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 26 35 EO 38 51 DC 74 91 DO 86 107 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 I Model MHS4-50D MHS4-63D CA 9 12 CB 20 22 +0.030 0 +0.030 0 0 0.036 0 0.043 9 11 SC 12 14 RB 34 38 O 5 5.5 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 Model MHS4-50D

C85

(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 113.5(117) {134

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

x 1.5 50 47 161 15 31 128 36 27 90 59 43 14 16 35 98 3/4 Up to 1200 M16 x 1.5 M36 x 1.5 56 53 182 17 36 144 30.5 40 90 59 43 14 18.5 39 106 3/4 Up to 1200 M18 x 1.5 M40 x 1.5 63 60 20 204 162 41 35 45 115 70 48 17 18.5 39 111 3/4 1 Up to 1200 M20 x 1.5 M45 x 1.5 63 60 20 226 46 182 35 50 115 74 48 17 18.5 39 111 Lube Non-lube Up to 1200 M24 x 1.5 M56 x 2 71 67 277 25 56 225 60 41.5 140 86

CY1

(variations on the order of 30%) D-Y7W D-Y7WV D-Z7 D-Z80 D-Z7 D-Z80 D-Y7W D-Y7WV Cylinder model CY1H10 65.5 65.5 65.5 59.5 59.5 59.5 CY1H15 72 72 72 122 122 122 CY1H20 77.5 77.5 77.5 127.5 127.5 127.5 CY1H25 86 86 86 164 164 164 CY1HT25 86 86 86 164 164 164 CY1HT32 82 82 82 183 183 183 Note) 50mm is the minimum stroke available with 2 auto switches mounted.

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

MGP

Dimensions (mm) MGF Bore (mm) Standard stroke (mm) A E 25, 50st 50st< B C DA DB FA FB G GA GB GC H HA J K L 25, 50st 50st< CY1 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 MY1 Bore (mm) Standard stroke (mm) 50 80 RL RR RB RA QB QA Q PW PB PA P OL OB OA NL NN ML MM 14 20 M8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

86 (223.5) LEPY LEPS (90) (88) Stroke 61 90 Encoder Z-phase detecting position Note 3) (4) 21 LER 68 53.8 85.5 LEH 8 31 LEY -X5 8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9 ( ) depth 6 n x 6.6 11LEFS 7 11LEJS 76 25A150 LEC D x 150 (= E) 60 15 B LEC S Motor option: With lock Motor cable (7) LEC SS-T Encoder cable (7) (253.5) LEC Y LEC Y Motorless LAT Dimensions [mm] Note 1) When

15

Dimensions: Ball Screw Drive LEFS40 +0.030 0 6H9 ( ) depth 7 (170) 106 Body mounting reference plane Note) 4 x M8 x 1.25 thread depth 13 60 58 +0.030 0 7 74 6H9 ( ) depth 7 A (Table traveling distance) 86 48 FF L Motor mount 4 x FA thread thread depth FB 13 (86) 90 67.5 Mounting pitch: FC 45 61 Motor 53.8 68 (68) Motor mating part: FD, depth FE 8 31 8 M4 x 0.7 thread depth 8 (F.G. terminal

Electric Actuator with Integrated Guide

Model Controller Regenerative absorption unit LC7R-K1A (Refer to page 86 for details.) Model Note) Be sure to use a regenerative absorption unit with this product.

MG

E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

Floating Joint

86 11 14 18 18 22 22 16 16 20 22 24 28 32 32 41 46 55 70 1.25 2.5 2.8 5.2 9 9.3 Semi-standard: Heavy Load Type Hydraulic: Up to 7 MPa JAHF63-24-200 JAHF80-30-200 JAHF100-42-300 63 80 100 22000 36000 55000 24 30 42 100 125 150 72 82 100 66 79 96 21 24 29 2 2 3 106 131 152 24 38 42 2 2.5 3 2.8 5.2 9 18 18 22 20 22 24 41 46 55 60 73.5 86 Foot Type: JAHL JAHL40, 50 Center of sphere x R JAHL63

CS1

1/2 3/4 M14 X 1.5 M30 X 1.5 15 27 31 16 43 14 36 90 59 128 50 47 161 35 98 to 1200 M16 X 1.5 M36 X 1.5 30.5 36 17 18.5 14 43 59 144 40 90 182 56 53 106 39 3/4 to 1200 M18 X 1.5 M40 X 1.5 41 35 20 17 18.5 70 48 115 204 162 45 60 63 111 39 3/4 1 to 1200 M20 X 1.5 M45 X 1.5 20 46 35 18.5 17 48 115 74 50 60 226 182 63 111 39 Lube Non-lube to 1200 M24 X 1.5 41.5 M56 X 2 25 56 23 60 20 60 140 86

Air Slide Table

For details, refer to the adjuster specifications on page 86. *1 Refer to page 86 for the minimum operating pressure of the metal stopper with bumper. If the operating pressure is lower than the minimum operating pressure, the repeated accuracy will decline.

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

MY1

B A 10 16 20 Mounting position A 31 24 39 B 129 86 161 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A Mounting position 10 16 20 A 31 24 39 B 129 86 161