REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

Compact 5-Port Solenoid Valve

EX120 EX260 EX250 EX600 EX245 Chart Valve Lead Wire D-sub Flat Ribbon Terminal Block Connector Connecting Base How to Order Ejectors w q e r t y ZK2 A C K 5 A C 12 08 ZK2mA Series u i e Combination of supply valve and release valve q Body/Exhaust type w Nominal nozzle size Symbol Body Exhaust type Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Plug-in Common Dimensions Made to Order

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

SY

83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Terminal block (M3) 9 pins Terminal block

ZP

Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

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(C) Outlet air press. dew point (C) Ambient temp.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure

ZP3

B C D E Y q Pad dia.

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Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the

Air Slide Table

(Retraction stroke end adjusters can be mounted afterward.) * Dimensions other than those listed above are the same as those for the standard type. 66 Air Slide Table Single Side-ported Type RoHS 8, 12 MXQmC Series How to Order C 30 ZA MXQ 12 M9BW q w e r t y u i t Functional options u Number of auto switches w Body option q Bore size e Standard stroke [mm] Standard type Symmetric type C

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

Rotary Actuator/Vane Type

ring Block C Block C Counterclockwise Counterclockwise D The maximum rotation range of the shaft with single flat is 270, from End q to End w, when using the actuator for 270 and End q side in Fig. 4-1 is stopped using the internal stopper and End w side is adjusted using Block C.

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w No. q w e r t y u i o !

NCQ8

Note 2) According to the rubber bumper type, projection of piston rods will be [0.16] and [0.10 + STROKE] for sides. 056 (3/4"), 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole P-port 2 places H-thread C-depth 4 places Q Q Z C-depth J E D-rod dia. M2 bolt circle H-thread M1 W I dia. D-rod dia.

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft