MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

MXQ

watchmakers screwdriver with a handle about 5 to 6 mm in diameter.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 #6 !0 yoiu@2%0%1q%3e !6!7!8#8!9@0 !3 CX MY2C16 @9 D%6 -X !4 #1@3@9 !5@8 @7 %5!2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.

ZP

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from a> and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa

100

VAC 4 DC Nil 300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm Supply valve/ Release valve w Rated voltage DC CE-compliant AC (50/60 Hz) CE-compliant 5 24 VDC V 1 100 VAC 6 12 VDC V 2 200 VAC V 6 VDC V 3 110 VAC [115 VAC] S 5 VDC V 4 220 VAC [230 VAC] R 3 VDC V x How to Order Vacuum Pressure Switch * CE-compliant: For DC only A M L ZL ZSE30A 00 e Electrical

Stopper Cylinder

6 7 RS2H D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C 6 9.5 9 9.5 9.5 9.5 RSH 12 12 12 11 10 MIW MIS D-A79W 13 13 13 14 14 D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BA/F7BAV D-F79F/F7NT 6 5.5 6 6 6 5.5 5 D-P3DWA 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

C85

D-H7C D-H7W D-H7BAL D-H7NF NCM D-A79W 13.3 13.3 10 A B 26 NCA D-J79C Bore 17 Hs D-X B 8 (5) 2 4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015

Thermo-con/Rack Mount Type

Hz Single-phase 200 to 240 VAC 10%, 50/60 Hz Electrical system Overcurrent protector 14 A Current consumption 10 A (100 V) to 4 A (240 V) 7 A (200 V) to 6 A (240 V) Power consumption 900 W 1200 W Alarm Refer to Alarm.

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Table of Contents

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

MGP

3 Set of above @3, @4, @5, @6, @7 and @8 16 20 25 32 40 50 63 80 100 MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS Hex. socket head tapered plug Slide bearing Felt Resin Ball bushing Set of above @3, @4, @5, @6, @7 and @8 !4 !5 !6 !

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

HRX-OM-W002

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation