VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

17

depth K VV ZZ ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50

Cylinder

J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29

Free-Mounting Cylinder with Air Cushion Series CU

Oil proof heavy duty vinyl cord: 2.7, 0.5m D-F9N(V), D-F9P(V): 0.18mm x 3 cores (Brown, Black, Blue [Red, White, Black]) D-F9B(V): 0.15mm x 2 cores (Brown, Blue [Red, Black]) Note) Refer to page 7 for auto switch common specifications and lead wire length. Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

HRS100/150

HRS HRS 090 Heat quantity by cooled substance (per unit time) Q : Unknown [W] ([J/s]) Cooled substance : Water Cooled substance mass m : (= x V) [kg] Cooled substance density : 1 [kg/L] Cooled substance total volume V : 150 [L] Cooled substance specific heat C : 4.186 x 103 [J/(kgK)] Cooled substance temperature when cooling begins T0 : 303 [K] (30 [C]) Cooled substance temperature after

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) 3-wire IC circuit E76A 5 V Reed switch Solid state switch Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V E73A M5N M5P M5B M5NW M5PW M5BW M5NT M5PT Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) 3-wire IC circuit E76A 5 V Reed switch Solid state switch Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V E73A M5N M5P M5B M5NW M5PW M5BW M5NT M5PT Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

K + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115

Thermo-chiller

Heat quantity by cooled substance (per unit time) Q : Unknown [W] ([J/s]) Cooled substance : Water Cooled substance mass m : (= x V) [kg] Cooled substance density : 1 [kg/L] Cooled substance total volume V : 150 [L] Cooled substance specic heat C : 4.186 x 103 [J/(kgK)] Cooled substance temperature when cooling begins T0 : 303 [K] (30 [C]) Cooled substance temperature after t hour Tt :

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

Table of Contents

NPTF 1/8 Connector type (Lead wire: 0.6 m) T1 C Connector type (Lead wire: 3 m) CL Note) Single mounting style: M5 x 0.8 (female) threaded.

HRL

Heat quantity by cooled substance (per unit time) Q : Unknown [W] ([J/s]) Cooled substance : Water Cooled substance mass m : (= x V) [kg] Cooled substance density : 1 [kg/L] Cooled substance total volume V : 250 [L] Cooled substance specific heat C : 4.186 x 103 [J/(kgK)] Cooled substance temperature when cooling begins T0 : 305 [K] (32 [C]) Cooled substance temperature after t hour Tt

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82