LX Series Compact Electric Actuators

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake

Thermo-chiller/Rack Mount Type

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 15 x 860 1120 [W] Thermo-chiller Q x t: Heat capacity [kJ] 20C Water bath Cooling capacity = Considering a safety factor

Compact Vacuum Ejector Series ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 26 32 38 41 13 17 22 24 10 Series CHN Accessory Brackets (Optional) I-shaped single knuckle joint Bracket for clevis type Material: Cast iron 20: I-02 25: I-03 32: I-04 40: IHN-04 L tap 4-J counter bore 4-K Material: Rolled steel plate Material: Rolled steel plate RR1 NDH10 A B E F MM RR1 45 MM NDH10 D +0.2 +0.1 M C

Digital Pressure Sensor

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Electromagnetic Digital Flow Switch

Description Material 1 Pipe PPS 2 O-ring FKM 3 Attachment Brass 4 Spacer FKM w e e w 8 LFE Series Dimensions Integrated display type LFE1/2/3 K Width across flats H I L 4 x O J 2 x Port size M C N D Q P 1.41 E A B F G 1 For integrated display type The electrical entry for lead wire and M12 connector does not rotate and is limited to only one entry direction.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Cylinder

Description lVtaterial Q',y 6 . ., Aluminium alloy Blac k alumite SWitch mounti.ng bracket Piston seal NBR 2 OYP-6 Dy pl0 OYP15 ~ III Rod seal NBR 1 OYR-3K OYR-5K OYR-6K ~ Cap g~ket NBR 1 rPS X 1 ~9X~ ' ~14 X 1 Steel wire Black zinc chromate 1 Switch strew ;OO ... ~ , ~l-. I Auto 8witCN' D-90'0-97 Note)The Bmm bore cylinder is nol repairable. o Series CJP -~ D~--n-~-( -m) ,-.

Digital Flow Switch

Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

HRX-OM-O021

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

PSE550/300

or more between live parts and case (at 500 VDC) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 100 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized) 300 m/s2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less (Based on 25C) 4.8 (4.4 in the end) resin piping (Applicable to I.D. 4 air tubing) Resin pipe: Nylon, Piston area of sensor: Silicon

High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

PSxx-OMG0005CN

28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple

VXA21/22

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.