Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

MXY6 MXY8 MXY12 Model Allowable static load Table (4) Allowable Static Load: F (N) Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.

CJ2

B H 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 9.2 8 M6 x 1.0 4 6 5.5 6.4 M3 x 0.5 2.4 SNJ-010B 10 NTJ-010A 12.7 11 M8 x 1.0 4 10 7 8.1 M4 x 0.7 3.2 NDd9 NDH10 R1 NX U1 Part no.

EX260-SEN_eng

Y . X Valve manifold Accessories NOTE Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit. Tighten the screws with the specified tightening torque. (0.6 Nm) Y No.1 Description The direct current power supply to combine should be UL1310 Class2 power supply when conformity to UL is necessary.

Digital Flow Switch

Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

MXF

1 y Note Component Parts Description Body Table End plate Rail Guide Rod Piston assembly Seal support Head cap Floating bushing Orifice Roller stopper Cylindrical roller Roller spacer Rod bumper Description Adjust bumper Piston seal Rod seal O-ring Material Hard anodized Hard anodized Hard anodized Heat treated Heat treated Material Note No. q w e r t y No. !6 !7 !8 !

HRX-OM-R016

:2009 EMC Directive 2004/108/EC EN61000-6-2:2005 EN55011:2009+A1:2010 Name and address of the person authorised to compile the technical file: Mr.

HRX-OM-W038

:2009 EMC Directive 2004/108/EC EN61000-6-2:2005 EN55011:2009+A1:2010 Name and address of the person authorised to compile the technical file: Mr.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

MXQ

6 r u y w !

Series SV

How to Order EX500 ACY00 S Relay output module and Y type connector wiring example Relay output module (2 outputs) Y type connector 2 Solenoid Solenoid 2 4 4 Output A 1 Output B 3 2 4 82 Valve Manifold Specifications Series SV Valve Manifold Specifications Flat Ribbon Cable Single Valve Sub-plate D-sub Connector EX250 EX120 Circular Connector EX500 Valve Manifold Common Specifications

CRJ

1 y !2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

1 y !2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

V100

) (D, Y) VS N.C.

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

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L Y 0 __D . .

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !