Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

LEC-OM07605CN

V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

HRX-OM-R005

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Modular Type Regulators Series AR

Model Option AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Bracket assembly Note 1) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR10P-260S G27-10-R1 Set nut Note 3) Note 3) G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

Compact Vacuum Unit

voltage Power consumption (Current) 0.7 W (29 mA) Note 2) 0.7 W (58 mA) Note 2) L-type plug connector (With light/surge voltage suppressor) M-type plug connector (With light/surge voltage suppressor) Note 3) Electrical entry Note 1) Latching type is applicable only to the ejector nozzle sizes 0.3 mm and 0.4 mm Note 2) Inrush: 3.1 W (10 ms after energized); Holding: 0.7 W Note 3) M-type can

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Manifold Specifications

VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8

Sine Rodless Cylinder Series REA/REB

10 10 REAH20 16 16 13 13 REAH25 25 M3 REAHT25 W REAHT32 40 W M1 M2 Static Moment Moment generated by the workpiece mass even when the cylinder is stopped Pitch moment M1 = WL Yaw moment M3 = W (L A) Roll moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 0 0 L L A L M2 M1 M3 Since there are 2 guides, the guides central axis and the cylinders

KP/KPQ/KPG

D1 M M A L1 MS D1 D2 T L2 H VMG Connection threads Male Branch: KPQU, KPGU (M5) H (width across flats) Effective area mm2 D Model L TPH TPS A (M5) 2-Applicable tubing Note1) Connection thread R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03

REA/REB

M1 = WL Yaw moment M3 = W(LA) Roll moment M2 = WL (mm) High Precision Guide Type REAH Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 0 L L A L M2 M1 0 M3 Since there are 2 guides, the guides' central axis and the cylinder's central axis are the same.

AC Servo Motor Driver

3.24[N m] (28.7[lb in]) W W 10 2 10.

Shock Absorbers and Rate Controls

0filxZ(tll(Sl 2.0 12.05 *dio7 ioo +.01 5 / l . +.m l.J0 .630 +.0m/..0m 2.881.50 1.501.40t.06 N/A .t0 9.4 lbs. Otlh2.0iltx4(|UllSl 4.0 15.06 .t 5'l + 0n/. (m + n l l . ' +.m( l . : +.m( 1.50 .630 +.0ml..000 2.88 1.50 1.50 1.401.06N/A .90 r0.7 lk.

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

LEC-OM069xx

D i s p l a y a n d SigmaWin+TM 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

(Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.