V100

. 600 (Lead wire length) 48.6 [50.8] VT VP (Light/Surge voltage suppressor) VG 41.5 [48.5] + M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx.

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

Manifold Regulator ARM1000/2000 Series

1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Air Slide Table Series MXQ

B C 25 42 MXQ-CT12 (L)-X12 5 23 MXQ-CT16 (L) J M5 x 12 M10 x 1 MXQ16 (L) 15 35.5 12 33.5 14 20 5 17 33 MXQ-CT16 (L)-X11 A K 25 43 MXQ-CT16 (L)-X12 5 27 MXQ-CT20 (L) MXQ20 (L) M5 x 14 15 13 37 44.5 41 17 25 6 23 M12 x 1.25 MXQ-CT20 (L)-X11 25 47 MXQ-CT20 (L)-X12 5 30 MXQ-CT25 (L) MXQ25 (L) M6 x 18 M14 x 1.5 15 40 15 49 53.5 19 31 6 28 MXQ-CT25 (L)-X11 25 50 MXQ-CT25 (L)-X12 1) Size of hexagon

ISO Cylinder

EE G1 G2 H K KK L LD LH LX N1 N2 NA S SW (WH) (XB) ZZ 8 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 10 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x

Table of Contents

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

CXS

L A93L 5m .

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

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r 140-150 16,9'8 Tube Connection Male thread Female thread 12",:18 M5XO.8,M6 x l M4 x 0.7,M5 x 0,8 Mounting Thread dia 110-1)6 M5XO.8,M6 x l M5 x 0.8,M6 x 1 12Q'9'32 M6X1,M8 x 1 M5 X0,8,M6xl ,M8 x 1.25 r ~40 150 M6Xl,M8X1 M6 x l,M8 x l ,25 Pad type Aat type FI, at with rib Deep type Bellows type Pad Oia.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

Flow Control Equipment

JIS Symbol How to Order AS 2 2 0 0 M S Options Body size None Sealant S 1 2 M5 1/8, A1/4 For low speed operation Port size Style Port size Applicable series Cylinder direct connected elbow style 2 Tube Cylinder M5 X 0.8 R(PT)1/8 R(PT)1/4 AS12l0M-M5 AS22l0M-01 AS22l0M-02 M5 01 02 Rc(PT)1/8 Rc(PT)1/4 Controlled method 0 1 Meter-out Meter-in Needle Valve/Flow Characteristics AS12l0M-M5 AS22l0M

Electric Actuator with Integrated Guide

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

Stainless Steel One-touch Fittings Series KG

L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

Booster Regulator/Air Tank

X104 U ARM Tank capacity Chinese pressure vessel regulations compliant product Symbol Internal capacity 05 5 L 10 10 L 20 22 L, 20 L 38 38 L ARP Safety valve/Pressure gauge set Note) Symbol Applicable model IR-A U VBAT05A1, VBAT10A1 VBAT05S1, VBAT10S1 IR T VBAT20A1, VBAT38A1 VBAT20S1, VBAT38S1 Material IRV Symbol Material A1 Carbon steel S1 Stainless steel Note) When a drain valve is required

10

Bore size [mm] Dd9 L l m d Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A Rear flange: CBM2G Bore size Stroke -H -R -W N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Front trunnion: CBM2U Bore size Stroke A Rear trunnion: CBM2T Bore size Stroke -H -R -W N L -H -R -W N L A (mm) Axial foot Rear flange Bore size (mm) Z LS ZZ Double lock 152

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Rear trunnion: CBM2T Bore size Stroke Front trunnion: CBM2U Bore size Stroke A -H -R -W -H -R -W N L N L A (mm) Axial foot Rear flange Bore size (mm) LS ZZ Double lock 152 156 156 184 Z Rear lock 141 145 145 176 Front lock