MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(For manifold type 20) Body ported 5 L SYJ5 2 1 0 M5 2 5 0 L SYJ5 4 Base mounted Thread type Rc G NPT NPTF Nil F N T Body option Coil specifications Manual override Nil Standard With power saving circuit <24 V, 12 VDC only> 0: Pilot valve individual exhaust for the pilot valve Nil: Non-locking push type T Power saving circuit is not available in the case of D, DO or W type.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

LEC-OM02704CN

[A] [V] [pF] [V] TND20V-431K 275 350 10/1 195 1.0 100 710 1300 430(387473) 100V 200V 7000/2 TND20V-471K 300 385 215 775 1200 470(423517) [mm] D H T E ()L d W D T Max.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Vacuum Pad

Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

reduces flow setting time

3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

240

2 e w i !1 t !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3 @0 q MSQA (High precision type) Component Parts Description Material Description Material Deep groove ball bearing Needle bearing Deep groove ball bearing No. q w e r t y u No.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

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Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C